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2011 | 120 | 1 | 200-203
Article title

Ultrathin NbN Films for Superconducting Single-Photon Detectors

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EN
Abstracts
EN
We present our research on fabrication and structural and transport characterization of ultrathin superconducting NbN layers deposited on both single-crystal Al_2O_3 and Si wafers, and SiO_2 and Si_3N_4 buffer layers grown directly on Si wafers. The thicknesses of our films varied from 6 nm to 50 nm and they were grown using reactive RF magnetron sputtering on substrates maintained at the temperature 850°C. We have performed extensive morphology characterization of our films using the X-ray diffraction method and atomic force microscopy, and related the results to the type of the substrate used for the film deposition. Our transport measurements showed that even the thinnest, 6 nm thick NbN films had the superconducting critical temperature of 10-12 K, which was increased to 14 K for thicker films.
Keywords
Year
Volume
120
Issue
1
Pages
200-203
Physical description
Dates
published
2011-07
References
  • 1. G.N. Gol'tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, R. Sobolewski, Appl. Phys. Lett. 79, 705 (2001)
  • 2. K.M. Rosfjord, J.K.W. Yang, E.A. Dauler, A.J. Kerman, V. Anant, B. Voronov, G.N. Gol'tsman, K.K. Berggren, Opt. Expr. 14, 527 (2006)
  • 3. G. Gol'tsman, O. Minaeva, A. Korneev, M. Tarkhov, I. Rubtsova, A. Divochiy, I. Milostnaya, G. Chulkova, N. Kaurova, B. Voronov, D. Pan, A. Cross, A. Pearlman, I. Komissarov, W. Slysz, R. Sobolewski, IEEE Trans. Appl. Supercond. 17, 246 (2007)
  • 4. J. Chen, J.B. Altepeter, M. Medic, K.F. Lee, B. Gokden, R.H. Hadfield, S.W. Nam, P. Kumar, Phys. Rev. Lett. 100, 133603 (2008)
  • 5. M.T. Jarvi, M.J. Niedre, M.S. Patterson, B.C. Wilson, Photochem. Photobiol. 82, 1198 (2006)
  • 6. S. Tatsuya, S. Shoichi, S. Nami, Y. Tetsuya, J. Ling, U. Yoshinori, M. Hiroyuki, Y. Satoshi, IEEE Trans. Appl. Supercond. 23, 45004 (2010)
  • 7. F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, S. Hold, M. Benkahoul, F. Lévy, A. Fiore, Opt. Expr. 16, 3191 (2008); F. Marsili, D. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, S. Hold, M. Benkahoul, F. Lévy, A. Fiore, Opt. Expr. 16, 3191 (2008)
  • 8. J.R. Gao, M. Hajenius, F.D. Tichelaar, T.M. Klapwijk, B. Voronov, E. Grishin, G.N. Gol'tsman, C.A. Zorman, M. Mehregany, Appl. Phys. Lett. 91, 062504 (2007)
  • 9. J.C. Villegier, S. Bouat, P. Cavalier, R. Setzu, R. Espiaude Lamaëstre, C. Jorel, P. Odier, B. Guillet, L. Mechin, M.P. Chauvat, P. Ruterana, IEEE Trans. Appl. Supercond. 19, 3375 (2009)
  • 10. S. Miki, M. Fujiwara, M. Sasaki, Z. Wang, IEEE Trans. Appl. Supercond. 17, 285 (2007)
  • 11. R. Espiau de Lamaëstre, Ph. Odier, E. Bellet-Amalric, P. Cavalier, S. Pouget, J.-C. Villegier, J. Phys., Conf. Series 97, 012046 (2008)
  • 12. M. Kidszun, R. Hühne, B. Holzapfel, L. Schultz, Supercond. Sci. Technol. 23, 025010 (2010)
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv120n150kz
Identifiers
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