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2011 | 120 | 1 | 184-187
Article title

Plasma Ion Source with an Internal Evaporator

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EN
Abstracts
EN
A new construction of a hollow cathode ion source equipped with an internal evaporator heated by a spiral cathode filament and arc discharge is presented. The source is especially suitable for production of ions from solids. The proximity of arc discharge region and extraction opening enables production of intense ion beams even for very low discharge current (I_{a} = 1.2 A). The currents of 50 μA (Al^{+}) and 70 μA (Bi^{+}) were obtained using the extraction voltage of 25 kV. The source is able to work for several tens of hours without maintenance breaks, giving possibility of high dose implantations. The paper presents the detailed description of the ion source as well as its experimental characteristics like dependences of extracted currents and anode voltage on anode and cathode currents.
Keywords
EN
Contributors
author
  • Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland
author
  • Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland
author
  • Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland
author
  • Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland
author
  • Institute of Atomic Energy, 05-400 Otwock/Świerk, Poland
References
  • 1. X. Ren, Z. Zhao, W. Zhao, Rev. Sci. Instrum. 79, 02C717 (2008)
  • 2. K. Potzger, S. Zhou, F. Eichhorn, M. Helm, W. Skorupa, A. Mücklich, J. Fassbender, J. Appl. Phys. 99, 063906 (2006)
  • 3. H. Zhang, Ion Sources, Springer-Verlag, Berlin 1999
  • 4. L. Bischoff, J. Teichert, J. Phys. D, Appl. Phys. 33, L69 (2000)
  • 5. H. Waldmann, B. Martin, Nucl. Instrum. Methods Phys. Res. B 98, 532 (1995)
  • 6. G.D. Alton, G.D. Mills, J. Dellwo, Rev. Sci. Instrum. 65, 2006 (1994)
  • 7. J.R. Southon, M.L. Roberts, Nucl. Instr. Meth. Phys. Res. B 172, 257 (2000)
  • 8. Y.C. Feng, S.P. Wong, Nucl. Instrum. Methods Phys. Res. B 149, 195 (1999)
  • 9. J. Meldizon, A. Drozdziel, A. Latuszynski, S. Prucnal, K. Pyszniak, D. Maczka, Vacuum 70, 447 (2003)
  • 10. M. Rosiński, J. Badziak, F.P. Boody, S. Gammino, H. Hora, J. Krása, L. Láska, A.M. Mezzasalma, P. Parys, K. Rohlena, L. Torrisi, J. Ullschmied, J. Wołowski, E. Woryna, Vacuum 78, 435 (2005)
  • 11. A.A.I. Khalil, M.A. Gondal, Nucl. Instrum. Methods Phys. Res. B 267, 3356 (2009)
  • 12. M. Turek, S. Prucnal, A. Drozdziel, K. Pyszniak, Rev. Sci. Instrum. 80, 043304 (2009)
  • 13. M. Turek, S. Prucnal, K. Pyszniak, A. Drozdziel, Nucl. Instr. Meth. Phys. Res. B 269, 700 (2011)
  • 14. I.G. Brown, B. Feinberg, J.E. Galvin, J. Appl. Phys. 63, 4889 (1988)
  • 15. J.H.M. Neijzen, A. Donszelmann, Physica 106C, 271 (1981)
  • 16. http://www.highvolteng.com/media/Leaflets/Model_SO-55_Ion_Source.pdf
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv120n146kz
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