Plasma Ion Source with an Internal Evaporator

• Authors: M. Turek , A. Droździel , K. Pyszniak , S. Prucnal , D. Mączka
• Languages of publication: EN

Abstracts

EN

A new construction of a hollow cathode ion source equipped with an internal evaporator heated by a spiral cathode filament and arc discharge is presented. The source is especially suitable for production of ions from solids. The proximity of arc discharge region and extraction opening enables production of intense ion beams even for very low discharge current (I_{a} = 1.2 A). The currents of 50 μA (Al^{+}) and 70 μA (Bi^{+}) were obtained using the extraction voltage of 25 kV. The source is able to work for several tens of hours without maintenance breaks, giving possibility of high dose implantations. The paper presents the detailed description of the ion source as well as its experimental characteristics like dependences of extracted currents and anode voltage on anode and cathode currents.

Keywords

EN

07.77.Ka; 34.80.Dp; 61.72.uj

Discipline

• 61.72.uj: III-V and II-VI semiconductors
• 34.80.Dp: Atomic excitation and ionization
• 07.77.Ka: Charged-particle beam sources and detectors(see also 29.40.-n Radiation detectors in nuclear physics)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2011
• Volume: 120
• Issue: 1
• Pages: 184-187

Dates

published

2011-07

Contributors

author

M. Turek

• Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

A. Droździel

• Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

K. Pyszniak

• Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

S. Prucnal

• Institute of Physics, Maria Curie-Skłodowska University in Lublin, pl. M. Curie-Skłodowskiej 1, 20-031 Lublin, Poland

author

D. Mączka

• Institute of Atomic Energy, 05-400 Otwock/Świerk, Poland

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Identifiers

DOI

10.12693/APhysPolA.120.184