Formation of Cone-Shaped Inclusions and Line Defects on the Cz-Si Wafer Surface by the Helium Implantation and DC Nitrogen Plasma Treatment

Frantskevich, N.; Mazanik, A.; Frantskevich, A.; Kołtunowicz, T.; Żukowski, P.

doi:10.12693/APhysPolA.120.105

Journal

Acta Physica Polonica A

2011 | 120 | 1 | 105-107

Article title

Formation of Cone-Shaped Inclusions and Line Defects on the Cz-Si Wafer Surface by the Helium Implantation and DC Nitrogen Plasma Treatment

Authors

N. Frantskevich , A. Mazanik , A. Frantskevich , T. Kołtunowicz , P. Żukowski

Content

Full texts:

http://przyrbwn.icm.edu.pl/APP/PDF/120/a120z1p26.pdf [remote]

Title variants

Languages of publication

Abstracts

The general goal of this work is to investigate the defects formed on the surface of the Cz-Si wafers subjected to helium implantation, vacuum annealing and nitrogen plasma treatment. The performed scanning electron microscopy study has shown that in the general case two types of surface defects can be formed: cone-shaped inclusions with the base diameter of 0.2-2 μm and the ratio of diameter to height of approximately 1:1, as well as crystallographically oriented line defects with the length equal to 0.2-2 μm. The concentration of these defects depends on the conditions of implantation and plasma treatment.

Keywords

61.72.uf 73.20.Hb

Discipline

Publisher

Journal

Acta Physica Polonica A

Year

2011

Volume

120

Issue

Pages

105-107

Physical description

Dates

published

2011-07

Contributors

author

N. Frantskevich

Belarussian National Technical University, 65, Nezavisimosti St., 220063 Minsk, Belarus

author

A. Mazanik

Belarussian State University, 4, Nezavisimosti St., 220030 Minsk, Belarus

author

A. Frantskevich

Belarussian National Technical University, 65, Nezavisimosti St., 220063 Minsk, Belarus

author

T. Kołtunowicz

Lublin University of Technology, Nadbystrzycka 38, 20-618 Lublin, Poland

author

P. Żukowski

Lublin University of Technology, Nadbystrzycka 38, 20-618 Lublin, Poland

References

1. N.V. Frantskevich, A.V. Frantskevich, A.K. Fedotov, A.V. Mazanik, Solid State Phenomena 156-158, 91 (2010)
2. B. Terreault, Physica Status Solidi A 204, 2129 (2007)
3. A.V. Frantskevich, A.M. Saad, A.V. Mazanik, N.V. Frantskevich, A.K. Fedotov, V.S. Kulinkauskas, A.A. Patryn, J. Mater. Sci. Mater. Electron. 19, S239 (2008)

Document Type

Publication order reference

Identifiers

DOI

10.12693/APhysPolA.120.105

YADDA identifier

bwmeta1.element.bwnjournal-article-appv120n126kz