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Abstracts
Morphology and electron-transport properties in the photoresist-silicon structures implanted by 60 keV antimony in the fluence range 1 × 10^{15} ÷ 5 × 10^{16} cm^{-2} with the ion current density 4 μA/cm^2 have been investigated. Microhardness increases with the increasing fluence. Non-monotonous dependence of microhardness on the depth in the implanted structures was observed. Transition from insulating to the metallic regime of conductivity was not observed.
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Year
Volume
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Pages
46-48
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Dates
published
2011-07
Contributors
author
- Polotski State University, Blohina str. 29, Novopolotsk-211440, Belarus
author
- Belarussian State University, Nezavisimosti ave. 4, Minsk-220050, Belarus
author
- Belarussian State University, Nezavisimosti ave. 4, Minsk-220050, Belarus
author
- Belarussian State University, Nezavisimosti ave. 4, Minsk-220050, Belarus
author
- Belarussian State University, Nezavisimosti ave. 4, Minsk-220050, Belarus
author
- Belarussian State University, Nezavisimosti ave. 4, Minsk-220050, Belarus
author
- Belarussian State University, Nezavisimosti ave. 4, Minsk-220050, Belarus
author
- Lublin University of Technology, Nadbystrzycka 38D, 20-618 Lublin, Poland
References
- 1. V.N. Popok, in: Surface Science Research, Ed. Ch.P. Norris, Nova Science Publ., New York 2005, p. 147
- 2. I. Azarko, Yu. Bumai, V. Volobuev, P. Zukowski, M. Lukashevich, V. Odzhaev, in: Proc. 6th Int. Conf. NEET-2009, Zakopane (Poland), Lublin University of Technology, Lublin 2009, p. 144
- 3. A.R. Shugurov, A.V. Panin, K.V. Oskomov, Fiz. Tverd. Tela 50, 1007 (2008)
- 4. M.G. Lukashevich, V.N. Popok, V.B. Odzhaev, S.M. Lukashevich, R.I. Khaibullin, V.V. Bazarov, Dokl. NAN RB 48, 42 (2004)
- 5. N.F. Mott, E.A. Davis, Electronic Processes in Non-crystalline Materials, Clarendon Press, Oxford 1979
- 6. B. Abeles, P. Sheng, M. Coutts, Y. Arie, Adv. Phys. 24, 407 (1975)
- 7. B.I. Shklovskii, F.L. Efroc, Electron Properties of Doped Semiconductors, Nauka, Moskva 1979, p. 416 (in Russian)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv120n111kz