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2011 | 120 | 1 | 19-22
Article title

Numerical Modelling of the Electron Backscattering at the Variable Gas Pressure

Content
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Languages of publication
EN
Abstracts
EN
The authors prepared a computer programme for simulations of electron flow in various gas conditions. This software combines a commercial programme SIMION 3D v. 7.0, destined for computations of charged particles trajectories in electric and magnetic fields, and the Monte Carlo one written by the authors in the SIMION internal language. The programme takes into consideration the electron scattering in elastic and inelastic collisions, the ionising avalanche and γ processes. This programme was used to investigate the secondary electron backscattering by gas filling the sample chamber of the environmental scanning electron microscope and its influence on the signal to noise ratio S/N and material contrast suppression.
Keywords
EN
Contributors
author
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
author
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
References
  • 1. D.A. Moncreiff, P.R. Barker, V.N.E. Robinson, J. Phys. D 4, 481 (1979)
  • 2. P. Meredith, A.M. Donald, B.L. Thiel, Scanning 18, 467 (1996)
  • 3. W. Słówko, M. Krysztof, J. Microsc. 237, 292 (2010)
  • 4. M. Mitchner, Ch.H. Kruger, Partially Ionized Gases, Wiley, New York 1973
  • 5. G.N. Rochlin, Gas-discharge light sources, Energija, Moskva 1966 (in Russian)
  • 6. S.M. Pimblott, J.A. LaVerne, A. Mozumder, J. Phys. Chem. 100, 8595 (1996)
  • 7. D.C. Joy, M.S. Prasad, H.M. Meyer, J. Microsc. 215, 77 (2004)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv120n104kz
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