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2011 | 119 | 5 | 686-688
Article title

ZnO Thin Films Deposited on Sapphire by High Vacuum High Temperature Sputtering

Content
Title variants
Languages of publication
EN
Abstracts
EN
ZnO (0001) layers on sapphire (0001) substrates were fabricated by means of high temperature high vacuum magnetron sputtering. The layers were deposited onto a thin MgO buffer and a low temperature ZnO nucleation layer, which is a technology commonly used in MBE ZnO growth. This paper reports on using this technology in the sputtering regime.
Keywords
Year
Volume
119
Issue
5
Pages
686-688
Physical description
Dates
published
2011-05
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv119n535kz
Identifiers
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