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2011 | 119 | 5 | 686-688
Article title

ZnO Thin Films Deposited on Sapphire by High Vacuum High Temperature Sputtering

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EN
Abstracts
EN
ZnO (0001) layers on sapphire (0001) substrates were fabricated by means of high temperature high vacuum magnetron sputtering. The layers were deposited onto a thin MgO buffer and a low temperature ZnO nucleation layer, which is a technology commonly used in MBE ZnO growth. This paper reports on using this technology in the sputtering regime.
Keywords
Contributors
  • Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland
  • Institute of Physics, PAS, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, PAS, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, PAS, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Physics, PAS, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland
author
  • Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland
References
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Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv119n535kz
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