Cathodoluminescence Profiling for Checking Uniformity of ZnO and ZnCoO Thin Films

• Authors: B. Witkowski , M. Łukasiewicz , E. Wolska , K. Kopalko , B. Kowalski , E. Guziewicz , M. Godlewski
• Languages of publication: EN

Abstracts

EN

We employ scanning electron microscopy and cathodoluminescence for evaluation of uniformity of ZnCoO films obtained by the atomic layer deposition. Cathodoluminescence quenching by Co ions allows us to detect (regions of weaker light emission) Co accumulations, with the resolution limited by diffusion length of secondary carriers.

Keywords

EN

81.15.Gh   78.30.Fs   78.60.Hk  

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2011
• Volume: 119
• Issue: 5
• Pages: 675-677

Dates

published

2011-05

References

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Identifiers

DOI

10.12693/APhysPolA.119.675