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2011 | 119 | 5 | 675-677
Article title

Cathodoluminescence Profiling for Checking Uniformity of ZnO and ZnCoO Thin Films

Content
Title variants
Languages of publication
EN
Abstracts
EN
We employ scanning electron microscopy and cathodoluminescence for evaluation of uniformity of ZnCoO films obtained by the atomic layer deposition. Cathodoluminescence quenching by Co ions allows us to detect (regions of weaker light emission) Co accumulations, with the resolution limited by diffusion length of secondary carriers.
Keywords
EN
Year
Volume
119
Issue
5
Pages
675-677
Physical description
Dates
published
2011-05
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv119n531kz
Identifiers
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