Single-Mode Rib Waveguides Fabricated by Means of Sol-Gel Method

• Authors: P. Karasiński , C. Tyszkiewicz , R. Rogoziński
• Languages of publication: EN

Abstracts

EN

Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO_2:TiO_2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO_2:TiO_2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.

Keywords

EN

42.82.Et; 81.20.Fw; 07.07.Df

Discipline

• 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• 81.20.Fw: Sol-gel processing, precipitation(for reactions in sol-gels, see 82.33.Ln; for sol-gels as disperse system, see 82.70.Gg)
• 42.82.Et: Waveguides, couplers, and arrays(for fiber waveguides, see 42.81.Qb)

• Journal: Acta Physica Polonica A
• Year: 2010
• Volume: 118
• Issue: 6
• Pages: 1168-1170

Dates

published

2010-12

Contributors

author

P. Karasiński

• Department of Optoelectronics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

author

C. Tyszkiewicz

• Department of Optoelectronics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

author

R. Rogoziński

• Department of Optoelectronics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

References

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Identifiers

DOI

10.12693/APhysPolA.118.1168