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Number of results
2010 | 118 | 6 | 1168-1170
Article title

Single-Mode Rib Waveguides Fabricated by Means of Sol-Gel Method

Content
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Languages of publication
EN
Abstracts
EN
Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO_2:TiO_2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO_2:TiO_2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.
Keywords
EN
Contributors
  • Department of Optoelectronics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
  • Department of Optoelectronics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
  • Department of Optoelectronics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
References
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Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv118n620kz
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