Numerical Results of Modeling Semiconductor Sensor Layers in SAW Gas Sensors

• Authors: T. Hejczyk , M. Urbańczyk , W. Jakubik
• Languages of publication: EN

Abstracts

EN

The paper presents the numerical results of investigations of the layered gas surface acoustic waves sensor. The base electric load of the piezoelectric acoustic line is predicted by the effect of surface acoustic waves velocity changes vs. surface conductivity, which depends on the profile concentration by gas diffused molecules into the porous film. Inside the sensor layer Knudsen's model of gas diffusion was used.

Keywords

EN

77.65.Dq; 68.35.Iv; 07.07.Df

Discipline

• 77.65.Dq: Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics(see also 43.35.Pt Surface waves in solids and liquids—in Acoustics Appendix; for surface acoustic wave transducers, see 43.38.Rh—in Acoustics Appendix; for acousto-optical effects, see 78.20.hb, and 43.35.Sx—in Acoustics Appendix)
• 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• 68.35.Iv: Acoustical properties

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2010
• Volume: 118
• Issue: 6
• Pages: 1158-1160

Dates

published

2010-12

Contributors

author

T. Hejczyk

• ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland

author

M. Urbańczyk

• Faculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

author

W. Jakubik

• Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

References

• 1. T. Hejczyk, M. Urbańczyk, W. Jakubik, Acta Phys. Pol. A 118, 1148 (2010)
• 2. B.A. Auld, Acoustic Fields and Waves, Vol. 2, Wiley, New York 1973
• 3. G. Sakai, N. Matsunaga, E. Shimanoe, N. Yamazone, Sensors Actuators B 80, 125 (2001)
• 4. B. Pustelny, T. Pustelny, Acta Phys. Pol. A 116, 383 (2009)
• 5. T. Hejczyk, M. Urbańczyk, W. Jakubik, Acta Phys. Pol. A 118, 1152 (2010)
• 6. J.W. Gardner, Sensors Actuators B 1, 166 (1990)
• 7. T. Pustelny, A. Opilski, B. Pustelny, Acta Phys. Pol. A 114, A-181 (2009)
• 8. T. Pisarkiewicz, Gas Microsensors, AGH, Kraków 2007
• 9. J. Portier, H.S. Hilal, Prog. Solid State Chem. 32, 207 (2004)

Identifiers

DOI

10.12693/APhysPolA.118.1158