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Number of results
2010 | 118 | 6 | 1158-1160
Article title

Numerical Results of Modeling Semiconductor Sensor Layers in SAW Gas Sensors

Content
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Languages of publication
EN
Abstracts
EN
The paper presents the numerical results of investigations of the layered gas surface acoustic waves sensor. The base electric load of the piezoelectric acoustic line is predicted by the effect of surface acoustic waves velocity changes vs. surface conductivity, which depends on the profile concentration by gas diffused molecules into the porous film. Inside the sensor layer Knudsen's model of gas diffusion was used.
Keywords
EN
Contributors
author
  • ENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland
author
  • Faculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
author
  • Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
References
  • 1. T. Hejczyk, M. Urbańczyk, W. Jakubik, Acta Phys. Pol. A 118, 1148 (2010)
  • 2. B.A. Auld, Acoustic Fields and Waves, Vol. 2, Wiley, New York 1973
  • 3. G. Sakai, N. Matsunaga, E. Shimanoe, N. Yamazone, Sensors Actuators B 80, 125 (2001)
  • 4. B. Pustelny, T. Pustelny, Acta Phys. Pol. A 116, 383 (2009)
  • 5. T. Hejczyk, M. Urbańczyk, W. Jakubik, Acta Phys. Pol. A 118, 1152 (2010)
  • 6. J.W. Gardner, Sensors Actuators B 1, 166 (1990)
  • 7. T. Pustelny, A. Opilski, B. Pustelny, Acta Phys. Pol. A 114, A-181 (2009)
  • 8. T. Pisarkiewicz, Gas Microsensors, AGH, Kraków 2007
  • 9. J. Portier, H.S. Hilal, Prog. Solid State Chem. 32, 207 (2004)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv118n618kz
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