Semiconductor Sensor Layer in SAW Gas Sensors Configuration

• Authors: T. Hejczyk , M. Urbańczyk , W. Jakubik
• Languages of publication: EN

Abstracts

EN

A Rayleigh acoustic wave travelling on the surface of a semi-infinite piezoelectric medium may be changed by interaction with carriers and diffused gas in an adjacent semiconductor. The configuration, which uses a thin semiconductor film supported by a catalytic layer (Pd), is described in detail and the theoretical results of gas-sensor layer interaction are presented.

Keywords

EN

77.65.Dq; 68.35.Iv; 07.07.Df

Discipline

• 77.65.Dq: Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics(see also 43.35.Pt Surface waves in solids and liquids—in Acoustics Appendix; for surface acoustic wave transducers, see 43.38.Rh—in Acoustics Appendix; for acousto-optical effects, see 78.20.hb, and 43.35.Sx—in Acoustics Appendix)
• 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• 68.35.Iv: Acoustical properties

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2010
• Volume: 118
• Issue: 6
• Pages: 1153-1157

Dates

published

2010-12

Contributors

author

T. Hejczyk

• WASKO S.A., Berbeckiego 6, 44-100 Gliwice, Poland

author

M. Urbańczyk

• Faculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

author

W. Jakubik

• Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

References

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• 7. W. Jakubik, M. Urbańczyk, E. Maciak, T. Pustelny, Acta Phys. Pol. A 116, 315 (2009)
• 8. W. Jakubik, M. Urbańczyk, J. Tech. Phys. IV 38, 589 (1997)
• 9. D.L. White, J. Appl. Phys. 33, 2547 (1962)
• 10. B. Pustelny, T. Pustelny, Acta Phys. Pol. A 116, 383 (2009)
• 11. M. Urbańczyk, Arch. Acoust. 22, 187 (1997)

Identifiers

DOI

10.12693/APhysPolA.118.1153