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2010 | 118 | 6 | 1153-1157
Article title

Semiconductor Sensor Layer in SAW Gas Sensors Configuration

Content
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Languages of publication
EN
Abstracts
EN
A Rayleigh acoustic wave travelling on the surface of a semi-infinite piezoelectric medium may be changed by interaction with carriers and diffused gas in an adjacent semiconductor. The configuration, which uses a thin semiconductor film supported by a catalytic layer (Pd), is described in detail and the theoretical results of gas-sensor layer interaction are presented.
Keywords
EN
Contributors
author
  • WASKO S.A., Berbeckiego 6, 44-100 Gliwice, Poland
author
  • Faculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
author
  • Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
References
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  • 4. W. Jakubik, Thin Solid Films 515, 8345 (2007)
  • 5. W. Jakubik, Sensors Actuators B 96, 321 (2003)
  • 6. T. Pustelny, A. Opilski, B. Pustelny, Acta Phys. Pol. A 114, A-181 (2009)
  • 7. W. Jakubik, M. Urbańczyk, E. Maciak, T. Pustelny, Acta Phys. Pol. A 116, 315 (2009)
  • 8. W. Jakubik, M. Urbańczyk, J. Tech. Phys. IV 38, 589 (1997)
  • 9. D.L. White, J. Appl. Phys. 33, 2547 (1962)
  • 10. B. Pustelny, T. Pustelny, Acta Phys. Pol. A 116, 383 (2009)
  • 11. M. Urbańczyk, Arch. Acoust. 22, 187 (1997)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv118n617kz
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