The Influence of Argon on the Deposition and Structure of Polycrystalline Diamond Films

• Authors: K. Benzhour , J. Szatkowski , F. Rozpłoch , K. Stec
• Languages of publication: EN

Abstracts

EN

Thin polycrystalline diamond films were deposited on prepared (100) Si substrate by hot filament chemical vapor deposition using a mixture of hydrogen, propane-butane and argon. During investigations the gas flow of argon was varied from 100 sccm to 400 sccm. Scanning electron microscopy analysis revealed that the addition of argon to the gas phase influenced the growth rate and film structure. An increase of argon concentration provokes an increase in film porosity and decrease in crystalline facetting. The quality of these films was investigated with the use of the Raman spectroscopy.

Keywords

EN

68.55.A-

Discipline

• 68.55.A-: Nucleation and growth

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2010
• Volume: 118
• Issue: 3
• Pages: 447-449

Dates

published

2010-09

Contributors

author

K. Benzhour

• Department of Bases of Theoretical Biomedical Studies and Medical Computer Science, Collegium Medicum Nicolaus Copernicus University, Jagiellońska 13, 85-067 Bydgoszcz, Poland

author

J. Szatkowski

• Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University, Grudziądzka 5, 87-100 Toruń, Poland

author

F. Rozpłoch

• Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University, Grudziądzka 5, 87-100 Toruń, Poland

author

K. Stec

• Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University, Grudziądzka 5, 87-100 Toruń, Poland

References

• 1. S. Matsumoto, Y. Sato, M. Kamo, N. Setaka, Jpn. J. Appl. Phys. 21, 182 (1982)
• 2. A.R. Badzian, T. Badzian, R. Roy, R. Messier K.E. Spear, Mater. Res. Bull. 23, 531 (1988)
• 3. J.C. Arnault, L. Demuynck, C. Speisser, F. Le Normand, Euro Phys. J. B 11, 327 (1999)
• 4. S. Buhlmann, E. Blank, R. Haubner, B. Lux, Diamond Relat. Mater. 8, 194 (1999)
• 5. V. Baranauskas, H.J. Ceragioli, A.C. Peterlevitz, M.C. Tosin, S.F. Durrant, Thin Solid Films 377-378, 303 (2000)
• 6. V. Baranauskas, H.J. Ceragioli, A.C. Peterlevitz, M.C. Tosin, S.F. Durrant, Thin Solid Films 377-378, 182 (2000)
• 7. F. Rozpłoch, E. Fitzer, High Temperatures-High Pressures 20, 449 (1988)

Identifiers

DOI

10.12693/APhysPolA.118.447