Diamond in Surface Acoustic Wave Sensors

• Authors: M. Hribšek , S. Ristić , B. Radojković
• Languages of publication: EN

Abstracts

EN

The application of diamond in surface acoustic wave sensors is considered. The new method of the complete analyses of diamond-based gas chemical sensors is presented. It is based on the electromechanical equivalent circuit of the surface acoustic wave sensor. The method is very efficient and can be used for the optimal design of gas sensors. Since the diamond can be easily merged into solid state and biological systems, the development of smart biological sensors is possible. The advantages over silicon based sensors are also shown.

Keywords

EN

72.50.+b; 77.65.Dq; 43.35.Pt; 77.55.hd; 77.55.H-

Discipline

• 77.55.hd: AlN
• 77.65.Dq: Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics(see also 43.35.Pt Surface waves in solids and liquids—in Acoustics Appendix; for surface acoustic wave transducers, see 43.38.Rh—in Acoustics Appendix; for acousto-optical effects, see 78.20.hb, and 43.35.Sx—in Acoustics Appendix)
• 77.55.H-: Piezoelectric and electrostrictive films
• 72.50.+b: Acoustoelectric effects

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2010
• Volume: 117
• Issue: 5
• Pages: 794-798

Dates

published

2010-05

Contributors

author

M. Hribšek

• Institute Goša, Milana Rakića 35, 11000 Belgrade, Serbia

author

S. Ristić

• Institute Goša, Milana Rakića 35, 11000 Belgrade, Serbia

author

B. Radojković

• Institute Goša, Milana Rakića 35, 11000 Belgrade, Serbia

References

• 1. A. Pohl, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 47, 317 (2000)
• 2. E. Comini, G. Faglia, G. Sberveglieri, Solid State Gas Sensing, Springer Science+Business Media LLC, New York 2009
• 3. M. Golio, The RF and Microwave Handbook, 2nd ed., CRC Press LLC, Boca Raton 2008
• 4. S. Ahmadi, F. Hassani, C. Korman, M. Rahaman, M. Zaghloul, in: Proceedings of the IEEE Conference on Sensors, Vienna 2004, p. 1129
• 5. V. Mortet, O.A. Williams, K. Haenen, Phys. Stat. Sol. 205, 1009 (2008)
• 6. El Hakiki, M. Elmazria, O. Assouar, M.B. Mortet, Vincent Le Brizoual, L. Vanecek, M. Alnot, Diamond & Related Materials 14, 1175 (2005)
• 7. S. Shikata, S. Fujii, T. Uemura, K. Itakura, A. Hachigo, H. Kitabayashi, H. Nakahata, Y. Takada, New Diamond and Frontier Carbon Tehnology 15, 349 (2005)
• 8. M. Benetti, D. Cannatta`a, F.D. Pietrantonio, E. Verona, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 52, 1806 (2005)
• 9. P. Kirsch, M.B. Assouar, O. Elmazria, M.E. Hakiki, V. Moret, P. Alnot, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 54, 1486 (2007)
• 10. P. Kirsch, M.B. Assouar, O. Elmazria, V. Mortet, P. Alnot, Appl. Phys. Letts. 88, 223504 (2006)
• 11. T. Omori, A. Kobayashi, Y. Takagi, K. Hashimoto, M. Yamaguchi, in: Proceedings of Ultrasonics Symposium, 2008. IUS 2008. IEEE, Beijing 2008, p. 196
• 12. S. Besmaine, L.Le. Brizoual, M. Elmazria, J.J. Fundenberger, M. Belmahi, B. Benyoucef, Diamond and Related Materials 17, 1420 (2008)
• 13. S. Jian, B. YiZhen, S. JingChang, D. GuoTong, J. Xin1, Chinese Science Bulletin 53, 2931 (2008)
• 14. S. Sankaranarayanan, V.R. Bhethanabotla, B. Joseph, in: Proc. of 208th ECS Meeting, Eds: G. Hunter, P. Hesketh, C. Kranz, Los Angeles 2005, p. 19
• 15. C.-C. Sung, Y.-F. Chiang, R. Ro, R. Lee, S. Wu, in: Proceedings of Frequency Control Symposium, IEEE International, Besancon 2009, p. 446
• 16. C.G. Specht, O.A. Williams, R.B. Jackman, R. Schoepfer, Biomaterials 25, 4073 (2004)
• 17. A. Zaki, H. Elsimary, M. Zaghloul, in: Proceedings of the 5th WSEAS International Conference on Circuits, Systems, Electronics Control and Signal Processing, Dallas 2006, p. 10
• 18. S.J. Martin, G.C. Frye, S.D. Senturia, Analytical Chemistry 66, 2201 (1994)
• 19. L. Rufer, T. Lalinský, D. Grobelný, S. Mir, G. Vanko, Zs. Õszi, Ž. Mozolová, J. Gregus, in: Proceedings of the 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2006, Smolenice 2006, p. 165
• 20. M.B. Assouar, O. Elmazria, R. Jimenez, F. Sarry, P. Alnot, Applied Surface Science 164, 200 (2000)
• 21. M. Benetti, D. Cannata, A. D'Amico, F. Di Pietrantonio, A. Macagnano, E. Verona, in: Proceedings of the IEEE Conference on Sensors, Vienna 753 (2004)
• 22. C. Campbell, Surface Acoustic Wave Devices and their Signal Processing Applications, Academic Press, San Diego 1989
• 23. Z. Živković, M. Hribšek, D. Tošić, Informacije MIDEM 39, 111 (2009)
• 24. E.L. Adler, J.K. Slaboszewicz, G.W. Farnell, C.K. Jen, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 37, 215 (1990)
• 25. B.-S. Joo, J.-H. Lee, E.-W. Lee, K.-D. Song, D.-D. Lee, in: Proceedings of the 1st International Conference on Sensing Technology, Palmerston North 2005, p. 307

Identifiers

DOI

10.12693/APhysPolA.117.794