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Number of results
2010 | 117 | 5 | 748-751

Article title

Modeling of Electron Kinetics in BF_{3}

Content

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EN

Abstracts

EN
In this paper we used the available data for the electron impact scattering cross sections BF_{3} to calculate the transport coefficients for electrons. Monte Carlo simulation was used to perform calculations of the transport coefficients as well as the rate coefficients in DC electric fields, crossed electric and magnetic DC and RF fields.

Keywords

EN

Contributors

  • Institute of Physics, POB 68, 11080 Belgrade, Serbia
author
  • Institute of Physics, POB 68, 11080 Belgrade, Serbia
  • Faculty of Transport and Traffic Engineering, University of Belgrade, Belgrade, Serbia
  • Institute of Physics, POB 68, 11080 Belgrade, Serbia
  • Institute of Physics, POB 68, 11080 Belgrade, Serbia
author
  • Varian Semiconductor Equipment Associates, 35 Dory Road, GL-17, Gloucester, MA01930 USA
author
  • Jozef Stefan Institute, Jamova cesta 39, 1000 Ljubljana, Slovenia
author
  • Jozef Stefan Institute, Jamova cesta 39, 1000 Ljubljana, Slovenia

References

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Document Type

Publication order reference

Identifiers

YADDA identifier

bwmeta1.element.bwnjournal-article-appv117n505kz
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