PL EN


Preferences help
enabled [disable] Abstract
Number of results
2010 | 117 | 5 | 748-751
Article title

Modeling of Electron Kinetics in BF_{3}

Content
Title variants
Languages of publication
EN
Abstracts
EN
In this paper we used the available data for the electron impact scattering cross sections BF_{3} to calculate the transport coefficients for electrons. Monte Carlo simulation was used to perform calculations of the transport coefficients as well as the rate coefficients in DC electric fields, crossed electric and magnetic DC and RF fields.
Keywords
EN
Contributors
  • Institute of Physics, POB 68, 11080 Belgrade, Serbia
author
  • Institute of Physics, POB 68, 11080 Belgrade, Serbia
  • Faculty of Transport and Traffic Engineering, University of Belgrade, Belgrade, Serbia
  • Institute of Physics, POB 68, 11080 Belgrade, Serbia
  • Institute of Physics, POB 68, 11080 Belgrade, Serbia
author
  • Varian Semiconductor Equipment Associates, 35 Dory Road, GL-17, Gloucester, MA01930 USA
author
  • Jozef Stefan Institute, Jamova cesta 39, 1000 Ljubljana, Slovenia
author
  • Jozef Stefan Institute, Jamova cesta 39, 1000 Ljubljana, Slovenia
References
  • 1. T. Makabe, Z.Lj. Petrović, Plasma Electronics New York: Taylor and Francis, (2006); Z.Lj. Petrović, S. Dujko, D. Marić, G. Malović, Ž. Nikitović, O. Šašić, J. Jovanović, V. Stojanović, M. Radmilović-Rađenović unpublished J. Phys. D, Appl. Phys. (2009)
  • 2. R.E. Robson, R.D. White, Z.Lj. Petrović, Rev. Mod. Phys. 77, 1303 (2005)
  • 3. S. Radovanov, L. Godet, R. Dorai, Z. Fang, B.W. Koo, C. Cardinaud, G. Cartry, D. Lenoble, A. Grouillet, J. Appl. Phys. 98, 113307 (2005); L. Godet, Z. Fang, S. Walther, S. Radovanov, E. Arevalo, J. Scheuer, G. Cartry, C. Cardinaud, F. Lallement, D. Lenoble, JVST B 24, 2391 (2006)
  • 4. S. Dujko, R.D. White, Z.Lj. Petrović, J. Phys. D, Appl. Phys. 41, 245205 (2008)
  • 5. S. Dujko, R.D. White, K.F. Ness, Z.Lj. Petrović, R.E. Robson, J. Phys. D, Appl. Phys. 39, 4788 (2006), Z.Lj. Petrović, M. Šuvakov, Ž. Nikitović, S. Dujko, O. Šašić, J. Jovanović, G. Malović, V. Stojanović, Plasma Sources Sci. Technol. 16, S1 (2007)
  • 6. S. Biagi, private communication (2005)
  • 7. O. Šašić, Z.Lj. Petrović, Z. Raspopović, L. Godet, S. Radovanov, 58th Annual Gaseous Electronics Conference, San Jose, California, October 16-20, 2005, Bul. Am. Phys. Soc. 50, 28 UH2 4 (2005)
  • 8. Z. Raspopović, S. Sakadžić, Z.Lj. Petrović, T. Makabe, J. Phys. D, Appl. Phys. 33, 1298 (2000)
  • 9. Z.Lj. Petrović, V.D. Stojanović, JVSTA 16, 329 (1998)
  • 10. M. Radmilović, Z.Lj. Petrović, EPJ AP 11, 35 (2000)
  • 11. S.R. Hunter, J.G. Carter, L.G. Christophorou, J. Appl. Phys. 65, 1858 (1989)
  • 12. Z.Lj. Petrović, R.W. Crompton, G.N. Haddad, Aust. J. Phys. 37 23 (1984); S.B. Vrhovac, Z.Lj. Petrović, Phys. Rev. E 53, 4012 (1996)
  • 13. T. Shimada, Y. Nakamura, Z.Lj. Petrović, T. Makabe, J. Phys. D 36, 1936 (2003)
  • 14. B.M. Jelenković, A.V. Phelps, Phys. Rev. A 36, 5310 (1987)
  • 15. S. Dujko, Z.M. Raspopović, Z.Lj. Petrović, J. Phys. D, Appl. Phys. 38, 2952 (2005)
  • 16. S. Rauf, M.J. Kushner, J. Appl. Phys. 85, 3460 (1999)
  • 17. V.D. Stojanović, Z.Lj. Petrović, J. Phys. D, Appl. Phys. 31, 834 (1998); Z.Lj. Petrović, A.V. Phelps, Phys. Rev. E 80, 016408 (2009)
  • 18. K. Endo, S. Noda, T. Ozaki, S. Samukawa, M. Masahara, Y. Liu, K. Ishii, H. Takashima, E. Sugimata, T. Matsukawa, H. Yamauchi, Y. Ishikawa, E. Suzuki, Jpn. J. Appl. Phys. 45, 5513 (2006)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv117n505kz
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.