Modeling of Electron Kinetics in BF_{3}

• Authors: Ž. Nikitović , O. Šašić , Z. Raspopović , V. Stojanović , S. Radovanov , M. Mozetič , U. Cvelbar
• Languages of publication: EN

Abstracts

EN

In this paper we used the available data for the electron impact scattering cross sections BF_{3} to calculate the transport coefficients for electrons. Monte Carlo simulation was used to perform calculations of the transport coefficients as well as the rate coefficients in DC electric fields, crossed electric and magnetic DC and RF fields.

Keywords

EN

51.10.+y; 52.20.Fs; 52.65.Pp

Discipline

• 52.65.Pp: Monte Carlo methods
• 51.10.+y: Kinetic and transport theory of gases(see also 05.20.Dd Kinetic theory in classical statistical mechanics; see also 47.70.Mc Radiation gas dynamics)
• 52.20.Fs: Electron collisions

• Journal: Acta Physica Polonica A
• Year: 2010
• Volume: 117
• Issue: 5
• Pages: 748-751

Dates

published

2010-05

Contributors

author

Ž. Nikitović

• Institute of Physics, POB 68, 11080 Belgrade, Serbia

author

O. Šašić

• Institute of Physics, POB 68, 11080 Belgrade, Serbia
• Faculty of Transport and Traffic Engineering, University of Belgrade, Belgrade, Serbia

author

Z. Raspopović

• Institute of Physics, POB 68, 11080 Belgrade, Serbia

author

V. Stojanović

• Institute of Physics, POB 68, 11080 Belgrade, Serbia

author

S. Radovanov

• Varian Semiconductor Equipment Associates, 35 Dory Road, GL-17, Gloucester, MA01930 USA

author

M. Mozetič

• Jozef Stefan Institute, Jamova cesta 39, 1000 Ljubljana, Slovenia

author

U. Cvelbar

• Jozef Stefan Institute, Jamova cesta 39, 1000 Ljubljana, Slovenia

References

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Identifiers

DOI

10.12693/APhysPolA.117.748