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2009 | 116 | S | S-117-S-119
Article title

Porous Silicon Formation by Metal-Assisted Chemical Etching

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EN
Abstracts
EN
The method of metal-assisted chemical etching produces a porous silicon layer. Palladium particles are deposited on both: multi-crystalline and Czochralski grown mono-crystalline Si wafers by immersing them in PdCl_{2} solution for 1 to 3 min. X-ray photoelectron spectroscopy analysis of Pd clusters shows a decrease in Pd metal fraction by prolonged immersion time t from F_{Pd} = 71.2% for t = 1 min to F_{Pd} = 61.4% for t = 3 min due to Pd oxidation process. Porous silicon forms by metal-assisted chemical etching in a HF:H_{2}O_{2} solution for 1 to 3 min. Photoluminescence of metal-assisted chemical etched samples exhibits the peak with a maximum of t at λ=650 nm independent of the etching time. Simultaneously, the intensity of the photoluminescence spectra strongly decreases for extended etching time t = 3 min. This behavior is attributed to increasing layer macroporosity, which strongly reduces amount of light emitting nanocrystallites.
Keywords
Year
Volume
116
Issue
S
Pages
S-117-S-119
Physical description
Dates
published
2009-12
References
  • 1. L.T. Canham, Appl. Phys. Lett. 57, 1046 (1990)
  • 2. X. Li, P.W. Bohn, Appl. Phys. Lett. 77, 2572 (2000)
  • 3. S. Koynov, M.S. Brandt, M. Stutzmann, Appl. Phys. Lett. 88, 203107 (2006)
  • 4. T. Hadjersi, N. Gabouze, N. Yamamoto, C. Benazzouz, H. Cheraga, Vacuum 80, 366 (2005)
  • 5. C. Chartier, S. Bastide, C. Levy-Clement, in: Proc. 22nd Europ. Photovoltaic Solar Energy Conf., Eds. G. Willeke, H. Ossenbrink, P. Helm, (WIP-Renewable Energies, Munich 2007, p. 1231
  • 6. K. Tsujino, M. Matsumara, Electrochim. Acta 53, 28 (2007)
  • 7. NIST X-ray Photoelectron Spectroscopy Database, http://srdata.nist.gov/xps
  • 8. C. Delerue, G. Allan, M. Lannoo, Phys. Rev. B 48, 11024 (1993)
  • 9. T. Hadjersi, N. Gabouze, N. Yamamoto, K. Sakamaki, H. Takai, A. Ababou, E.S. Kooij, Phys. Status Solidi C 2, 3384 (2005)
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv116ns32kz
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