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2009 | 116 | S | S-105-S-107
Article title

Analysis of Interaction of Surfactant Molecules with Si(hkl) Planes on the Basis of Anisotropic Etching in Alkaline Solutions

Content
Title variants
Languages of publication
EN
Abstracts
EN
In the paper, measurements of surface tension of solutions used for silicon etching and results of etching in the solutions are presented. Based on the obtained results, the analysis of interactions of surfactants with differently oriented silicon planes has been carried out.
Keywords
EN
Year
Volume
116
Issue
S
Pages
S-105-S-107
Physical description
Dates
published
2009-12
References
  • 1. I. Zubel, M. Kramkowska, Sens. Actuat A 115, 549 (2004)
  • 2. K. Szymczyk, B. Janczuk, J. Colloid Interface Sci. 303, 319 (2006)
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv116ns28kz
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