Utilization of Digital Processing of the Optical Scanning Field View for Tip-Sample Distance Estimation during the Approach Procedure

• Authors: A. Sikora , Ł. Bednarz
• Languages of publication: EN

Abstracts

EN

In this article we present the method of determining the tip-sample distance using advanced data processing of scanning field's optical picture. This feature can reduce both: the approach process time and the risk of damaging the tip or the sample. Experimental results will be also presented.

Keywords

EN

06.60.Sx; 07.05.Pj; 07.79.-v

Discipline

• 07.05.Pj: Image processing(see also 42.30.Va in optics; 87.57.-s Medical imaging in biological and medical physics; 95.75.Tv Digitization techniques in astronomy)
• 07.79.-v: Scanning probe microscopes and components(see also 68.37.-d Microscopy of surfaces, interfaces, and thin films)
• 06.60.Sx: Positioning and alignment; manipulating, remote handling

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2009
• Volume: 116
• Issue: S
• Pages: S-99-S-101

Dates

published

2009-12

Contributors

author

A. Sikora

• Electrotechnical Institute, Division of Electrotechnology and Materials Science, M. Skłodowskiej-Curie 55/61, 50-369 Wrocław, Poland

author

Ł. Bednarz

• Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, Z. Janiszewskiego 11/17, 50-372 Wrocław, Poland

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Identifiers

DOI

10.12693/APhysPolA.116.S-99