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2009 | 116 | S | S-99-S-101
Article title

Utilization of Digital Processing of the Optical Scanning Field View for Tip-Sample Distance Estimation during the Approach Procedure

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In this article we present the method of determining the tip-sample distance using advanced data processing of scanning field's optical picture. This feature can reduce both: the approach process time and the risk of damaging the tip or the sample. Experimental results will be also presented.
  • Electrotechnical Institute, Division of Electrotechnology and Materials Science, M. Skłodowskiej-Curie 55/61, 50-369 Wrocław, Poland
  • Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, Z. Janiszewskiego 11/17, 50-372 Wrocław, Poland
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