Preferences help
enabled [disable] Abstract
Number of results
2009 | 116 | S | S-92-S-94
Article title

Determination of the Analytical Relationship between Refractive Index and Density of SiO_{2} Layers

Title variants
Languages of publication
The main goal of the work was the elaboration of the analytical functional relationship between refractive index n and density ρ of SiO_{2} layers on silicon substrates. Such ρ (n) relationship will give possibility to determine elastic and non-elastic strains in SiO_{2} layers on silicon substrates. Ellipsometric measurements by using variable angle spectroscopic ellipsometer of J.A. Woollam Company allowed determination of thicknesses and refractive indexes of silica layers. Measured SiO_{2} masses and calculated volumes of the layers gave possibility to define the degree of densification of silicon dioxide layers on silicon substrates. The Hill approximation function curve turned out to be the best fitting. The obtained Hill curve shows saturation for the density of silicon dioxide equal to ca. 4.53 g/cm^{3}. This value corresponds to the value nearby the one of the crystalline polytypic silicon dioxide (stishovite). It seems to be physically established that degree of densification tends to the limiting value.
  • Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland
  • Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland
  • 1. Software for VASE and M-44 ellipsometers - Guide to Using WVAS 32, J.A. Woollam Co. Inc., 1991
  • 2. T. Tiwald,, 2009, Newsletters Articles 10 Sellmeier Dispersion
  • 3. J.A. Woollam Co. Inc. WVASE 32 program v. 3.441, tabulated at UNL, Lincoln University, Nebrasca, USA, 1991
  • 4. D.E. Aspnes, J.B. Theetn, Phys. Rev. Lett. 43, 1046 (1979)
  • 5. C.M. Herzinger, B. Johs, W.A. McGahan, J.A. Woollam, W. Paulson, J. Appl. Phys. 83, 3323 (1998)
  • 6. C. Zhao, P.R. Lefebvre, E.A. Irene, Thin Solid Films 313-314, 286 (1998)
  • 7. J.M. Thomas, Mathematics 22, 109 (1936)
  • 8. L. Banyai, P. Gartner, Phys. Rev. B 29, 728 (1984)
  • 9. K.E. Oughstun, N.A. Cartwright, Opt. Express 11, 1541 (2003)
  • 10. K. Vedam, P. Limsuwan, J. Chem. Phys. 69, 4772 (1978)
  • 11. W.A. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977)
  • 12. K. Taniguchi, M. Tanaka, C. Hamaguchi, J. Appl. Phys. 67, 2195 (1990)
  • 13. P. Drude, Lehrbuch der Optik, Lepzig 1900
  • 14. W. Rzodkiewicz, A. Panas, J. Telecommun. Inf. Technol. 3, 44 (2007)
  • 15. Sheng-Nian Luo, Lianqing Zheng, O. Tschauner, J. Phys., Condens. Matter. 18, 659 (2006)
Document Type
Publication order reference
YADDA identifier
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.