Normal Force Calibration Method Used for Calibration οf Atomic Force Microscope

• Authors: M. Ekwińska , Z. Rymuza
• Languages of publication: EN

Abstracts

EN

Development of new technologies for micro/nanostructures is connected with introduction of new materials or with application of already existing ones in micro- and nanoscale. Unfortunately material parameters in macro- and micro/nanoscale are not the same. For this reason it has become crucial to identify nanomechanical properties of materials commonly used in micro- and nanostructures technology. One of the tests used for that purpose is nanowear test made on the atomic force microscope. However, to obtain quantitative results of measurements, precision calibration step is necessary. In this paper a novel approach to calibration of normal force, which is acting on the tip of an atomic force microscope cantilever, is discussed. Presented method is based on application of known normal force directly on the tip using special test structure. Such an approach allows for measurements of nanowear parameters (force, displacement) with uncertainty better than ± 3%. Authors present and discuss different constructions of calibration samples. A comparison of described method with already existing ones is also presented.

Keywords

EN

07.79.Lh; 68.37.Ps; 06.20.fb; 06.20.F-; 81.70.Bt; 06.20.-f

Discipline

• 06.20.-f: Metrology
• 06.20.fb: Standards and calibration
• 68.37.Ps: Atomic force microscopy (AFM)
• 07.79.Lh: Atomic force microscopes
• 81.70.Bt: Mechanical testing, impact tests, static and dynamic loads(see also 62.20.M- Structural failure of materials; 46.50.+a Fracture mechanics, fatigue, and cracks)
• 06.20.F-: Units and standards

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2009
• Volume: 116
• Issue: S
• Pages: S-78-S-81

Dates

published

2009-12

Contributors

author

M. Ekwińska

• Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland

author

Z. Rymuza

• Warsaw University of Technology, Institute of Micromechanics and Photonics, A. Boboli 8, Warsaw, Poland

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Identifiers

DOI

10.12693/APhysPolA.116.S-78