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2009 | 116 | S | S-78-S-81
Article title

Normal Force Calibration Method Used for Calibration οf Atomic Force Microscope

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EN
Abstracts
EN
Development of new technologies for micro/nanostructures is connected with introduction of new materials or with application of already existing ones in micro- and nanoscale. Unfortunately material parameters in macro- and micro/nanoscale are not the same. For this reason it has become crucial to identify nanomechanical properties of materials commonly used in micro- and nanostructures technology. One of the tests used for that purpose is nanowear test made on the atomic force microscope. However, to obtain quantitative results of measurements, precision calibration step is necessary. In this paper a novel approach to calibration of normal force, which is acting on the tip of an atomic force microscope cantilever, is discussed. Presented method is based on application of known normal force directly on the tip using special test structure. Such an approach allows for measurements of nanowear parameters (force, displacement) with uncertainty better than ± 3%. Authors present and discuss different constructions of calibration samples. A comparison of described method with already existing ones is also presented.
Keywords
Year
Volume
116
Issue
S
Pages
S-78-S-81
Physical description
Dates
published
2009-12
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv116ns20kz
Identifiers
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