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Number of results
2009 | 116 | S | S-72-S-74

Article title

Thin Films Based on Nanocrystalline TiO_{2} for Transparent Electronics

Content

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Languages of publication

EN

Abstracts

EN
In this work, investigations of structural, optical and electrical properties of transparent oxide semiconductor thin films based on TiO_{2} doped with Eu, Pd and Tb, Pd have been presented. The transparent oxide semiconductor nanocrystalline thin films were prepared by magnetron sputtering process. It was shown that doping with selected elements results in semiconducting properties of prepared thin films of oxides with p-(TiO_{2}:(Tb, Pd)) or n-type (TiO_{2}:(Eu, Pd)) of electrical conduction.

Keywords

EN

Contributors

author
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
author
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
author
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
author
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
author
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland

References

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  • 2. D.G. Baik, S.M. Cho, Thin Solid Films 354, 227 (1999)
  • 3. H. Kobayashi, H. Mori, T. Ishida, Y. Nakato, J. Appl. Phys. 77, 1301 (1995)
  • 4. K. Tonooka, H. Bando, Y. Aiura, Thin Solid Films 445, 327 (2003)
  • 5. B. Levy, W. Liu, S.E. Gilbert, J. Phys. Chem. B 101, 1810 (1997)
  • 6. C.G. Granqvist, Solar Energy Mater. Solar Cells 91, 1529 (2007)
  • 7. D. Kaczmarek, J. Domaradzki, A. Borkowska, A. Podhorodecki, J. Misiewicz, K. Sieradzka, Opt. Appl. 37, 433 (2007)
  • 8. J. Domaradzki, A. Borkowska, D. Kaczmarek, E.L. Prociow, J. Non-Cryst. Solids 352, 2324 (2006)
  • 9. E.L. Prociow, J. Domaradzki, D. Kaczmarek, T. Berlicki, Polish patent No P382163 (2007)
  • 10. D. Kaczmarek, J. Domaradzki, E.L. Prociow, D. Wojcieszak, B. Michalec, Materiały Elektroniczne 36, 117 (2008) (in Polish)
  • 11. K. Sieradzka, J. Domaradzki, D. Kaczmarek, in: Proc. VII Int. Conf. on Advanced Semiconductor Devices and Microsystems, ASDAM'08, 2008, p. 243
  • 12. K. Bange, C.R. Ottermann, O. Anderson, U. Jeschowski, Thin Solid Films 197, 279 (1991)
  • 13. D.K. Schroder, Semiconductor Material and Device Characterization, Wiley-Interscience, New York 1998

Document Type

Publication order reference

Identifiers

YADDA identifier

bwmeta1.element.bwnjournal-article-appv116ns18kz
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