Bilayer Structures of NiO_{x} and Pd in Surface Acoustic Wave and Electrical Gas Sensor Systems

• Authors: W. Jakubik , M. Urbańczyk , E. Maciak , T. Pustelny
• Languages of publication: EN

Abstracts

EN

A bilayer sensor structure of nickel oxide NiO_x ( ≈ 60 nm) with a very thin film of palladium (Pd ≈ 18 nm) on the top, has been studied for gas-sensing application at relatively low temperatures of about 30°C and 60°C. The bilayer structure was obtained by rf sputtering and by vacuum deposition (first the NiO_{x} and then the Pd film) onto a LiNbO_{3} Y-cut Z-propagating substrate, making use of the surface acoustic wave method, and additionally (in the same technological processes) onto a glass substrate with a planar microelectrode array for simultaneous monitoring of the planar resistance of the layered structure. Such a bilayer structure was investigated in a low concentration range (from 50 ppm to 400 ppm in air) of nitrogen dioxide (NO_{2}), carbon monoxide (CO) and ammonia (NH_{3}) in a dry and wet air atmosphere and in a medium hydrogen concentration (1-2.5%) in dry air. The NiO_{x} and Pd bilayer structure interact rather weakly with NO_{2} molecules but with CO and NH_{3} this interaction is much greater, especially at higher temperature ( ≈ 60°C). The hydrogen sensitivity is on the medium level, not exceeding 600 Hz (relative change in the differential frequency of ≈ 2.3%) at interaction temperature of 35°C.

Keywords

EN

43.25.Fe; 77.65.Dq; 43.35.Pt; 68.35.Iv; 07.07.Df

Discipline

• 77.65.Dq: Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics(see also 43.35.Pt Surface waves in solids and liquids—in Acoustics Appendix; for surface acoustic wave transducers, see 43.38.Rh—in Acoustics Appendix; for acousto-optical effects, see 78.20.hb, and 43.35.Sx—in Acoustics Appendix)
• 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• 68.35.Iv: Acoustical properties

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2009
• Volume: 116
• Issue: 3
• Pages: 315-320

Dates

published

2009-09

Contributors

author

W. Jakubik

• Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

author

M. Urbańczyk

• Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

author

E. Maciak

• Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

author

T. Pustelny

• Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland

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Identifiers

DOI

10.12693/APhysPolA.116.315