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2009 | 116 | 3 | 315-320
Article title

Bilayer Structures of NiO_{x} and Pd in Surface Acoustic Wave and Electrical Gas Sensor Systems

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A bilayer sensor structure of nickel oxide NiO_x ( ≈ 60 nm) with a very thin film of palladium (Pd ≈ 18 nm) on the top, has been studied for gas-sensing application at relatively low temperatures of about 30°C and 60°C. The bilayer structure was obtained by rf sputtering and by vacuum deposition (first the NiO_{x} and then the Pd film) onto a LiNbO_{3} Y-cut Z-propagating substrate, making use of the surface acoustic wave method, and additionally (in the same technological processes) onto a glass substrate with a planar microelectrode array for simultaneous monitoring of the planar resistance of the layered structure. Such a bilayer structure was investigated in a low concentration range (from 50 ppm to 400 ppm in air) of nitrogen dioxide (NO_{2}), carbon monoxide (CO) and ammonia (NH_{3}) in a dry and wet air atmosphere and in a medium hydrogen concentration (1-2.5%) in dry air. The NiO_{x} and Pd bilayer structure interact rather weakly with NO_{2} molecules but with CO and NH_{3} this interaction is much greater, especially at higher temperature ( ≈ 60°C). The hydrogen sensitivity is on the medium level, not exceeding 600 Hz (relative change in the differential frequency of ≈ 2.3%) at interaction temperature of 35°C.
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  • 1. M. Penza, G. Cassano, P. Aversa, A. Cusano, M. Consales, M. Giordano, L. Nicolais, IEEE Sensors J. 6, 867 (2006)
  • 2. M. Penza, P. Aversa, G. Cassano, W. Wlodarski, K. Kalantar-Zadeh, Sensors Actuators B 127, 168 (2007)
  • 3. W. Jakubik, M. Urbanczyk, E. Maciak, T. Pustelny, Bull. Pol. Acad. Sci. 56, 133 (2008)
  • 4. W.P. Jakubik, M. Urbańczyk, S. Kochowski, J. Bodzenta, Sensors Actuators B 96, 321 (2003)
  • 5. W. Jakubik, M. Urbańczyk, E. Maciak, in: XX Eurosensors, Goeteborg 2006, Vol. 1, p. 124
  • 6. D'Amico, A. Palma, E. Verona, in: IEEE Ultrason. Symp., Vol. 1, 1982, p. 308
  • 7. A. Venema, E. Nieuwkoop, M.J. Vellekoop, W. Ghijsen, A. Barendsz, M.S. Nieuwenhuizen, IEEE Trans. Ultrasonics Ferroelectrics Freq. Control UFFC-34, 148 (1987)
  • 8. J.D. Galipeau, L.J. LeGore, K. Snow, J.J. Caron, J.F. Vetelino, J.C. Andle, Sensors Actuators B 35-36, 158 (1996)
  • 9. W. Jakubik, Mol. Quantum Acoustics 25, 141 (2004)
  • 10. W. Jakubik, M. Urbańczyk, in: Proc. IEEE Sensors 2004 Third Int. Conf. on Sensors, 2004, Vienna University of Technology, 2004, p. 1514
  • 11. W. Jakubik, J. Phys. IV (France) 137, 95 (2006)
  • 12. W. Jakubik, M. Urbańczyk, A. Opilski, Ultrasonics 39, 227 (2001)
  • 13. O. Varghese, D. Gong, W. Dreschel, K. Ong, C. Grimes, Sensors Actuators B 94, 27 (2003)
  • 14. H. Wohltjen, W.R. Barger, A. Snow, L. Jarvis, IEEE Trans. Electron Dev. ED-32, 1170 (1985)
  • 15. M.J. Vellekoop, Ultrasonics 36, 7 (1998)
  • 16. M. Tabib-Azar, B. Sutapun, R. Petrick, A. Kazemi, Sensors Actuators B 56, 158 (1999)
  • 17. T. Pustelny, A. Opilski, B. Pustelny, Acta Phys. Pol. A 114, A-181 (2008)
  • 18. S. Ippolito, S. Kandasamy, K. Kalantar-Zadeh, A. Trinchi, W. Wlodarski, Sensor Letters 1, 33 (2003)
  • 19. W. Jakubik, M. Urbanczyk, E. Maciak, T. Pustelny, Bull. Pol. Acad. Sci. 56, 133 (2008)
  • 20. S. Ippolito, S. Kandasamy, K. Kalantar-Zadeh, W. Wlodarski, Sensors Actuators B 108, 553 (2005)
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