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2009 | 116 | 3 | 315-320
Article title

Bilayer Structures of NiO_{x} and Pd in Surface Acoustic Wave and Electrical Gas Sensor Systems

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EN
Abstracts
EN
A bilayer sensor structure of nickel oxide NiO_x ( ≈ 60 nm) with a very thin film of palladium (Pd ≈ 18 nm) on the top, has been studied for gas-sensing application at relatively low temperatures of about 30°C and 60°C. The bilayer structure was obtained by rf sputtering and by vacuum deposition (first the NiO_{x} and then the Pd film) onto a LiNbO_{3} Y-cut Z-propagating substrate, making use of the surface acoustic wave method, and additionally (in the same technological processes) onto a glass substrate with a planar microelectrode array for simultaneous monitoring of the planar resistance of the layered structure. Such a bilayer structure was investigated in a low concentration range (from 50 ppm to 400 ppm in air) of nitrogen dioxide (NO_{2}), carbon monoxide (CO) and ammonia (NH_{3}) in a dry and wet air atmosphere and in a medium hydrogen concentration (1-2.5%) in dry air. The NiO_{x} and Pd bilayer structure interact rather weakly with NO_{2} molecules but with CO and NH_{3} this interaction is much greater, especially at higher temperature ( ≈ 60°C). The hydrogen sensitivity is on the medium level, not exceeding 600 Hz (relative change in the differential frequency of ≈ 2.3%) at interaction temperature of 35°C.
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Contributors
author
  • Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
author
  • Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
author
  • Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
author
  • Institute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
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Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv116n319kz
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