A Novel Solid State Pulsed Power Module for Excimer Laser

• Authors: C. Strowitzki
• Languages of publication: EN

Abstracts

EN

For effective excimer laser pumping high voltage pulses with the pulse duration of 100 ns and energies from a fraction of joules to some 10 joules are necessary. For the generation of these pulses traditionally Thyratron circuits are used. The limited lifetime and repetition rates of such a device does not fulfil not the requirements of a modern excimer laser. State of the art is a solid state circuit with IGBT switches, high voltage pulse transformer and pulse compression networks. Due to the many stages, complexity is high and efficiency is moderate. To overcome this limitation a new solid state circuit for excimer laser pumping is developed. The circuit works without magnetic pulse compression. The switch is made by a stack of "off the self" MOSFETs and SiC diodes. In the presentation the general design and its calculation, diode and switch qualification and test results are presented.

Keywords

EN

84.70.+p

Discipline

• 84.70.+p: High-current and high-voltage technology: power systems; power transmission lines and cables(for superconducting cables, see 84.71.Fk)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2009
• Volume: 115
• Issue: 6
• Pages: 992-994

Dates

published

2009-06

Contributors

author

C. Strowitzki

• FB 16, Elektrische Energieversorgungssysteme, Universität Kassel, Kassel, Germany

References

• 1. Magnetic Pulse Compression for Excimer Lasers, Questek, Technical Note, No. 1 and No. 2, 1983
• 2. C.F. Strowitzki, A novel solid state pulsed power module for excimer laser, Verhandlungen DPG (VI) 42,3/K9.2 (2007)

Identifiers

DOI

10.12693/APhysPolA.115.992