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2009 | 115 | 6 | 992-994
Article title

A Novel Solid State Pulsed Power Module for Excimer Laser

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Content
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Languages of publication
EN
Abstracts
EN
For effective excimer laser pumping high voltage pulses with the pulse duration of 100 ns and energies from a fraction of joules to some 10 joules are necessary. For the generation of these pulses traditionally Thyratron circuits are used. The limited lifetime and repetition rates of such a device does not fulfil not the requirements of a modern excimer laser. State of the art is a solid state circuit with IGBT switches, high voltage pulse transformer and pulse compression networks. Due to the many stages, complexity is high and efficiency is moderate. To overcome this limitation a new solid state circuit for excimer laser pumping is developed. The circuit works without magnetic pulse compression. The switch is made by a stack of "off the self" MOSFETs and SiC diodes. In the presentation the general design and its calculation, diode and switch qualification and test results are presented.
Keywords
EN
Contributors
author
  • FB 16, Elektrische Energieversorgungssysteme, Universit├Ąt Kassel, Kassel, Germany
References
  • 1. Magnetic Pulse Compression for Excimer Lasers, Questek, Technical Note, No. 1 and No. 2, 1983
  • 2. C.F. Strowitzki, A novel solid state pulsed power module for excimer laser, Verhandlungen DPG (VI) 42,3/K9.2 (2007)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv115n614kz
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