Effect of Growth Parameters on Composition Distribution in Superlattice-in-Well Structure by Submonolayer Deposition Technique

• Authors: Guo-Zhi Jia , Jiang-Hong Yao , Yong-Chun Shu , Xiao-Dong Xing , Biao Pi
• Languages of publication: EN

Abstracts

EN

The superlattice-in-well structures were grown using a cycled submonolayer AlGaAs/GaAs deposition technique. The optical quality of Al-Ga interdiffusion in AlGaAs/GaAs superlattice was investigated by measuring the photoluminescence of samples grown at temperature from 610°C to 630°C. Results show that Al composition can be modulated under some growth temperature or period. Effect of the growth interrupt in the growth process of superlattice on film optical quality is also discussed. Especially, the role played by the period of superlattice in the process of obtaining high quality film material with low composition is investigated in detail.

Keywords

EN

81.15.Hi; 68.55.Ln; 68.65.Fg; 68.65.Cd

Discipline

• 81.15.Hi: Molecular, atomic, ion, and chemical beam epitaxy
• 68.65.Fg: Quantum wells
• 68.65.Cd: Superlattices
• 68.55.Ln: Defects and impurities: doping, implantation, distribution, concentration, etc.(for diffusion of impurities, see 66.30.J-)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2009
• Volume: 115
• Issue: 5
• Pages: 944-946

Dates

published

2009-05

received

2009-02-16

(unknown)

2009-04-15

Contributors

author

Guo-Zhi Jia

• Tianjin Institute of Urban Construction, Tianjin 300384, China

author

Jiang-Hong Yao

• The Key Lab of Advanced Technique and Fabrication for Weak-Light Nonlinear Photonics Materials Ministry of Education, TEDA Applied Physics School, Nankai University, Tianjin 300475, China

author

Yong-Chun Shu

• The Key Lab of Advanced Technique and Fabrication for Weak-Light Nonlinear Photonics Materials Ministry of Education, TEDA Applied Physics School, Nankai University, Tianjin 300475, China

author

Xiao-Dong Xing

• The Key Lab of Advanced Technique and Fabrication for Weak-Light Nonlinear Photonics Materials Ministry of Education, TEDA Applied Physics School, Nankai University, Tianjin 300475, China

author

Biao Pi

• The Key Lab of Advanced Technique and Fabrication for Weak-Light Nonlinear Photonics Materials Ministry of Education, TEDA Applied Physics School, Nankai University, Tianjin 300475, China

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Identifiers

DOI

10.12693/APhysPolA.115.944