Ion Beam Sputtering Monitored by Optical Spectroscopy

• Authors: M. El Fqih , P. Fournier
• Languages of publication: EN

Abstracts

EN

Optical spectroscopy gives a simple means to follow the evolution of the surface composition during ion beam sputtering. This is illustrated by three examples: air oxidised metals (Al and Cu), various CuAl alloys and the Cu_{98}Be_2 alloy. Several time scales are distinguished, corresponding to different processes: the elimination of surface contaminants, the removal of the corroded layer. The implications for the use of ion beam optical spectroscopy in surface analysis are discussed.

Keywords

EN

68.49.Sf; 79.20.Rf

Discipline

• 79.20.Rf: Atomic, molecular, and ion beam impact and interactions with surfaces(for atomic and molecular beam techniques, see 37.20.+j; see also 34.35.+a Interactions of atoms and molecules with surfaces)
• 68.49.Sf: Ion scattering from surfaces (charge transfer, sputtering, SIMS)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2009
• Volume: 115
• Issue: 5
• Pages: 901-904

Dates

published

2009-05

received

2008-05-19

(unknown)

2008-11-23

Contributors

author

M. El Fqih

• Laboratoire de Spectroscopie de Translation des Interactions Moléculaires, Université Paris-Sud, Bât. 478, 91405 Orsay, France
• Equipe SIAM - Département de Physique, Université Cadi Ayyad, Faculté des Sciences Semlalia, B.P. 2390, Marrakech, Maroc

author

P. Fournier

• Laboratoire de Spectroscopie de Translation des Interactions Moléculaires, Université Paris-Sud, Bât. 478, 91405 Orsay, France

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Identifiers

DOI

10.12693/APhysPolA.115.901