Ion Beam Sputtering Monitored by Optical Spectroscopy

• Authors: M. El Fqih , P. Fournier
• Languages of publication: EN

Abstracts

EN

Optical spectroscopy gives a simple means to follow the evolution of the surface composition during ion beam sputtering. This is illustrated by three examples: air oxidised metals (Al and Cu), various CuAl alloys and the Cu_{98}Be_2 alloy. Several time scales are distinguished, corresponding to different processes: the elimination of surface contaminants, the removal of the corroded layer. The implications for the use of ion beam optical spectroscopy in surface analysis are discussed.

Keywords

EN

68.49.Sf   79.20.Rf  

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2009
• Volume: 115
• Issue: 5
• Pages: 901-904

Dates

published

2009-05

received

2008-05-19

(unknown)

2008-11-23

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Identifiers

DOI

10.12693/APhysPolA.115.901