PL EN


Preferences help
enabled [disable] Abstract
Number of results
2009 | 115 | 5 | 901-904
Article title

Ion Beam Sputtering Monitored by Optical Spectroscopy

Content
Title variants
Languages of publication
EN
Abstracts
EN
Optical spectroscopy gives a simple means to follow the evolution of the surface composition during ion beam sputtering. This is illustrated by three examples: air oxidised metals (Al and Cu), various CuAl alloys and the Cu_{98}Be_2 alloy. Several time scales are distinguished, corresponding to different processes: the elimination of surface contaminants, the removal of the corroded layer. The implications for the use of ion beam optical spectroscopy in surface analysis are discussed.
Keywords
EN
Year
Volume
115
Issue
5
Pages
901-904
Physical description
Dates
published
2009-05
received
2008-05-19
(unknown)
2008-11-23
References
  • 1. C.W. White, Nucl. Instrum. Methods 149, 497 (1978)
  • 2. G.E. Thomas, Surf. Sci. 90, 381 (1979)
  • 3. E.W. Thomas, Vacuum 34, 1031 (1984)
  • 4. G. Betz, Nucl. Instrum. Methods Phys. Res. B 27, 104 (1987)
  • 5. M.L. Yu, Top. Appl. Phys. 64, 91 (1991)
  • 6. M. Suchanska, Prog. Surf. Sci. 54, 165 (1997)
  • 7. A. Cortona, W. Husinsky, G. Betz, Phys. Rev. B 59, 15495 (1999)
  • 8. J. Fournier, P.-G. Fournier, A. Kaddouri, H. Dunet, J. Appl. Phys. 69, 2382 (1991)
  • 9. P.-G. Fournier, J. Fournier, B. Bellaoui, O. Benoist d'Azy, G. Taieb, Nucl. Instrum. Methods Phys. Res. B 78, 144 (1993)
  • 10. O. Varenne, P.-G. Fournier, J. Fournier, B. Bellaoui, A. Faké, J. Rostas, G. Taieb, Nucl. Instrum. Methods Phys. Res. B 171, 259 (2000)
  • 11. P.-G. Fournier, A. Nourtier, M. Monkade, K. Berrada, H. Boughaleb, A. Outzourhit, R. Pichon, C. Haut, T. Govers, Compt. Rend. A. S., Phys. 7, 284 (2006)
  • 12. V.I. Shulga, private communication)
  • 13. R. Gago, L. Vázquez, R. Cuerno, M. Varela, C. Ballesteros, J.M. Albella, Appl. Phys. Lett. 78, 3316 (2001)
  • 14. P.-G. Fournier, A. Nourtier, V.I. Shulga, Phys. Chem. News 19, 60 (2004)
  • 15. P.-G. Fournier, A. Nourtier, V.I. Shulga, M. Ait El Fqih, Nucl. Instrum. Methods Phys. Res. B 230, 577 (2005)
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv115n509kz
Identifiers
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.