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2009 | 115 | 5 | 901-904
Article title

Ion Beam Sputtering Monitored by Optical Spectroscopy

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EN
Abstracts
EN
Optical spectroscopy gives a simple means to follow the evolution of the surface composition during ion beam sputtering. This is illustrated by three examples: air oxidised metals (Al and Cu), various CuAl alloys and the Cu_{98}Be_2 alloy. Several time scales are distinguished, corresponding to different processes: the elimination of surface contaminants, the removal of the corroded layer. The implications for the use of ion beam optical spectroscopy in surface analysis are discussed.
Keywords
EN
Contributors
author
  • Laboratoire de Spectroscopie de Translation des Interactions Moléculaires, Université Paris-Sud, Bât. 478, 91405 Orsay, France
  • Equipe SIAM - Département de Physique, Université Cadi Ayyad, Faculté des Sciences Semlalia, B.P. 2390, Marrakech, Maroc
author
  • Laboratoire de Spectroscopie de Translation des Interactions Moléculaires, Université Paris-Sud, Bât. 478, 91405 Orsay, France
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Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv115n509kz
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