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2009 | 115 | 3 | 755-757
Article title

The Influence of Reactive Gaseous Flow Rate and Composition on the Optical Properties of TiO_2 Thin Films Deposited by Dc Magnetron

Content
Title variants
Languages of publication
EN
Abstracts
EN
In the paper there are shown the changes in optical properties of TiO_2 thin films prepared by dc magnetron sputtering at different gas flow rates. We found that there is a drastic change in optical properties such as optical transmission, refractive index, extinction coefficient and optical band gap with the gaseous flow rate and composition. We observed an improvement in optical properties of the films that had been deposited at higher gaseous flow rate and at a certain gaseous composition.
Keywords
EN
Publisher

Year
Volume
115
Issue
3
Pages
755-757
Physical description
Dates
published
2009-03
received
2007-11-02
(unknown)
2008-02-20
Contributors
author
  • Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania
author
  • Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania
author
  • Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania
author
  • Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania
author
  • Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania
author
  • Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania
author
  • Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania
References
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Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv115n328kz
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