Investigation of H_2:CH_4 Plasma Composition by Means of Spatially Resolved Optical Spectroscopy

• Authors: R. Bogdanowicz
• Languages of publication: EN

Abstracts

EN

The system based on spatially resolved optical emission spectroscopy dedicated for in situ diagnostics of plasma assisted CVD processes is presented in this paper. Measurement system coupled with chemical vapour deposition chamber by dedicated fiber-optic paths enables investigation of spatial distribution of species densities (H_x, H^+, CH, CH^+) during chemical vapour deposition process. Experiments were performed for a various gas inlet configuration at range of microwave power up to 800 W. Spatially resolved optical spectroscopy results showed that inlet configuration based on injecting hydrogen in ECR region and methane in substrate area is the most efficient for H^+ and CH_{3}^{+} excitation. The designed prototype of the spatially resolved optical spectroscopy system enables the high-sensitivity measurements of concentration of the species in the microwave plasma and can be used for optimisation of diamond-like carbon synthesis.

Keywords

EN

85.60.-q; 42.81.-i; 07.57.-c; 42.15.Eq; 32.30.-r; 52.50.Sw; 81.05.Uw

Discipline

• 32.30.-r: Atomic spectra (see also 78.47.J- Ultrafast spectroscopy)
• 52.50.Sw: Plasma heating by microwaves; ECR, LH, collisional heating
• 42.15.Eq: Optical system design
• 07.57.-c: Infrared, submillimeter wave, microwave and radiowave instruments and equipment(for infrared and radio telescopes, see 95.55.Cs, 95.55.Fw, and 95.55.Jz in astronomy; for biophysical spectroscopic applications, see 87.64.-t)
• 85.60.-q: Optoelectronic devices(see also 42.79.-e Optical elements, devices and systems)
• 42.81.-i: Fiber optics

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2008
• Volume: 114
• Issue: 6A
• Pages: A-33-A-38

Dates

published

2008-12

Contributors

author

R. Bogdanowicz

• Department of Optoelectronics, Gdańsk University of Technology, Narutowicza 11/12, 80-952 Gdańsk, Poland

References

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Identifiers

DOI

10.12693/APhysPolA.114.A-33