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Number of results
2008 | 114 | 5 | 1303-1310
Article title

Characterization of ZnO Films Grown at Low Temperature

Content
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Languages of publication
EN
Abstracts
EN
ZnO thin films were grown by atomic layer deposition method at extremely low temperature using a reactive diethylzinc as a zinc precursor. Optical properties, electrical properties and surface morphology were examined by photoluminescence, Hall effect and atomic force microscope. The study shows correlation between optical, electrical properties and surface morphology in a series of samples of different thickness.
Keywords
EN
Year
Volume
114
Issue
5
Pages
1303-1310
Physical description
Dates
published
2008-11
received
2008-06-07
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv114n545kz
Identifiers
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