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2008 | 114 | 5 | 1131-1137
Article title

Multilayered ZnO Films of Improved Quality Deposited by Magnetron Sputtering

Content
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Languages of publication
EN
Abstracts
EN
Multilayered ZnO films were deposited by rf magnetron sputtering on silicon and sapphire substrates. The aim of this work is to improve structural quality of ZnO thin films grown on just listed substrates. Presented X-ray diffraction data testify to remarkable relaxation of compressive stress in two- and three-layered ZnO films in comparison with single-layer one.
Keywords
Publisher

Year
Volume
114
Issue
5
Pages
1131-1137
Physical description
Dates
published
2008-11
received
2008-06-07
Contributors
  • Institute for Problems of Material Science, NASU, 3 Krzhizhanovskogo st., Kiev, 03680, Ukraine
author
  • Institute for Problems of Material Science, NASU, 3 Krzhizhanovskogo st., Kiev, 03680, Ukraine
author
  • Institute for Problems of Material Science, NASU, 3 Krzhizhanovskogo st., Kiev, 03680, Ukraine
author
  • Institute for Problems of Material Science, NASU, 3 Krzhizhanovskogo st., Kiev, 03680, Ukraine
author
  • Institute of Applied Physics, NASU, 58 Petropavlovskaya st., Sumy, 40030, Ukraine
author
  • Institute of Applied Physics, NASU, 58 Petropavlovskaya st., Sumy, 40030, Ukraine
author
  • Institute of Applied Physics, NASU, 58 Petropavlovskaya st., Sumy, 40030, Ukraine
author
  • SSI 'Institute for Single Crystals', NASU, 60 Lenin Ave., Kharkov, 61001, Ukraine
References
  • 1. Z.K. Tang, G.K.L. Wong, P. Yu, M. Kawasaki, A. Ohtomo, H. Koinuma, Y. Segawa, Appl. Phys. Lett. 72, 3270 (1998)
  • 2. Y. Yoshino, K. Inoue, M. Takeuchi, K. Ohwada, J. Vacuum 51, 601 (1998)
  • 3. K. Tamura, A. Ohtomo, K. Saikusa, Y. Osaka, T. Makino, Y. Segawa, M. Sumiya, S. Fuke, H. Koinuma, M. Kawasaki, J. Cryst. Growth. 214/215, 59 (2000)
  • 4. Ű. Özgűr, Ya.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Dogan, V. Avrutin, S.-J. Cho, H. Morkoç, J. Appl. Phys. 98, 041301 (2005)
  • 5. Y. Chen, F. Jiang, L. Wang, C. Zheng, J. Dai, Y. Pu, W. Fang, J. Cryst. Growth 275, 486 (2005)
  • 6. G.V. Lashkarev, V.I. Lazorenko, V.A. Karpyna, V.D. Khranovskyy, A.I. Ievtushenko, I.V. Blonsky, I.N. Dmytruk, P.I. Korenyuk, V.A. Baturin, A.Yu. Karpenko, A.Ya. Dan'ko, A.T. Budnikov, M. Godlewski, J. Phys. Chem. Solid State 9, 375 (2008)
  • 7. A. Ohtomo, H. Kimura, K. Saito, T. Makino, Y. Segawa, H. Koinuma, M. Kawasaki, J. Cryst. Growth 214/215, 284 (2000)
  • 8. Powder Diffraction File, Card 36-1451, Joint Committee on Powder Diffraction Standards, ICDD, Newtown Square (PA) 2001
  • 9. R. Hong, J. Huang, H. He, Z. Fan, J. Shao, Appl. Surf. Sci. 242, 346 (2005)
  • 10. V. Khranovskyy, R. Minikayev, S. Trushkin, G. Lashkarev, V. Lazorenko, U. Grossner, W. Paszkowicz, A. Suchocki, B.G. Svensson, R. Yakimova, J. Cryst. Growth 308, 93 (2007)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv114n520kz
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