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2008 | 114 | 4 | 769-777
Article title

Zr, ZrN and Zr/Al Thin Films Deposition Using Arc Evaporation and Annealing

Content
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EN
Abstracts
EN
The chemical reactions are widely used for the layers of different composition formation. However, synthesis mechanism is a complicated process in thin films/layers system, and is not completely studied. The purpose of this paper was to analyze the kinetics of chemical compounds in reaction, to produce ZrO₂ thin films using arc evaporation and annealing (post-deposition), and to analyze them. The pure zirconium (Zr) and zirconium nitride (ZrN) were deposited using arc evaporation. 10% mol of aluminum was evaporated on a few Zr films. All deposited films were annealed in the air atmosphere gradually changing the temperature from 400°C to 1100°C in order to produce ZrO₂ films. The formation processes of the new phase were studied. Activation energy of the reactions was calculated. Structural properties were measured using X-ray diffraction, optical properties - using ellipsometry. Tetragonal phase of ZrO₂ was obtained in the annealing process of ZrO₂/Al thin film in the air atmosphere of 800°C.
Keywords
EN
Contributors
author
  • Department of Physics, Kaunas University of Technology, Studentu 50, LT-51368 Kaunas, Lithuania
author
  • Department of Physics, Kaunas University of Technology, Studentu 50, LT-51368 Kaunas, Lithuania
References
  • 1. S. Collard, H. Kupfer, W. Hoyer, G. Hecht, Vacuum 55, 153 (1999)
  • 2. P. Baumeister, O. Arnon, Appl. Opt. 16, 439 (1997)
  • 3. S.M. Meier, D.K. Gupta, J. Eng. Gas Turbines Power Trans. ASME 116, 250 (1994)
  • 4. S.J. Wang, C.K. Ong, S.Y. Xu, P. Chen, Appl. Phys. Lett. 78, 1604 (2001)
  • 5. J. Will, A. Mitterdorfer, C. Kleinlogel, D. Perednis, Solid State Ion. 131, 79 (2000)
  • 6. M.A. Boulouz, A. Giani, A. Boyer, Thin Solid Films 323, 85 (1998)
  • 7. P.C. Johnson, Physics of Thin Films, Academic Press, New York 1989
  • 8. J. Čyvienė, M. Laurikaitis, J. Dudonis, Mater. Sci. Eng. B 118, 238 (2005)
  • 9. K.H. Guenther, in: Handbook of Optical Properties: Thin Films for Optical Coatings, Ed. R.E. Hummel, CRC Press, Boca Raton 1995, p. 305
  • 10. L.I. Maissel, R. Glang, Handbook of Thin Film Technology, McGraw Hill Book Company, New York 1970
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv114n413kz
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