Journal
Article title
Title variants
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Abstracts
In this study amorphous hydrogenated carbon films (a-C:H) were formed on Si (111) from an Ar-C_2H_2 and Ar-C_2H_2-H_2 gas mixtures at 1000 Pa pressure using a plasma jet chemical vapour deposition. It is shown that by varying the Ar:C_2H_2 ratio and adding the hydrogen gas in plasma, the structure, surface morphology, growth rate of the coatings, and consequently their optical properties can be controlled.
Discipline
- 78.30.-j: Infrared and Raman spectra(for vibrational states in crystals and disordered systems, see 63.20.-e and 63.50.-x, respectively; for Raman spectra of superconductors, see 74.25.nd)
- 81.15.-z: Methods of deposition of films and coatings; film growth and epitaxy(for structure of thin films, see 68.55.-a; see also 85.40.Sz Deposition technology in microelectronics; for epitaxial dielectric films, see 77.55.Px)
Journal
Year
Volume
Issue
Pages
1063-1066
Physical description
Dates
published
2008-03
received
2007-08-26
Contributors
author
- Lithuanian Energy Institute, Breslaujos st. 3, LT-44403, Kaunas, Lithuania
- Kaunas University of Technology, Physics Department, Studentu st. 50, LT-51368, Kaunas, Lithuania
author
- Kaunas University of Technology, Physics Department, Studentu st. 50, LT-51368, Kaunas, Lithuania
author
- PoznańUniversity of Technology, Institute of Physics, Piotrowo 3, PL-60-965, Poznań, Poland
author
- Lithuanian Energy Institute, Breslaujos st. 3, LT-44403, Kaunas, Lithuania
References
- 1. J. Robertson, Mater. Sci. Eng. 37, 129 (2002)
- 2. S.A. Smallwood, K.C. Eapen, S.T. Patton, J.S. Zabinski, Wear 260, 1179 (2006)
- 3. M. Terrones, Ann. Rev. Mater. Res. 33, 419 (2003)
- 4. L. Marcinauskas, A. Grigonis, V. Kulikauskas, V. Valincius, Vacuum 81, 1220 (2007)
- 5. S.P. Louch, C.H. Wong, M.H. Hon, Thin Solid Films 498, 235 (2006)
- 6. J. Benedikt, K.G.Y. Letourneur, M. Wisse, D.C. Schram, M.C.M. van de Sanden, Diamond Relat. Mater. 11, 989 (2002)
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv113n363kz