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2005 | 107 | 5 | 717-723
Article title

Variable-Energy Positron Annihilation as Highly Sensitive Nanoporosimetry for Porous Thin Films

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EN
Abstracts
EN
Positron annihilation was applied to measuring critical pore sizes in various materials. In recent years, positron annihilation with a variable-energy positron beam has emerged as a powerful tool for the investigation of porous thin films synthesized as low-k dielectrics, high performance gas sensor materials, and so on. This paper is a brief overview of recent progress in nanopore characterization of thin films by means of positron annihilation with a description of several important issues relevant to positron annihilation.
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author
  • National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST), Tsukuba, Ibaraki 305-8565, Japan
author
  • National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST), Tsukuba, Ibaraki 305-8565, Japan
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Document Type
Publication order reference
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bwmeta1.element.bwnjournal-article-appv107n501kz
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