Porosity of Low-κ Materials Studied by Slow Positron Beam

• Authors: R. Brusa , C. Macchi , S. Mariazzi , G. Karwasz
• Languages of publication: EN

Abstracts

EN

The information about porosity in low-κ materials obtainable by depth profiling with positron annihilation spectroscopy is reviewed. In particular we focus on Doppler broadening spectroscopy and 2-3γ ratio of positronium measurements on SiOCH and amorphous carbon a-C:F:H thin films produced by plasma enhanced chemical vapour deposition.

Keywords

EN

71.60.+z; 78.70.Bj; 68.60.Dv; 68.90.+g

Discipline

• 78.70.Bj: Positron annihilation(for positron states, see 71.60.+z in electronic structure of bulk materials; for positronium chemistry, see 82.30.Gg in physical chemistry and chemical physics)
• 71.60.+z: Positron states(for positron annihilation, see 78.70.Bj)
• 68.60.Dv: Thermal stability; thermal effects
• 68.90.+g: Other topics in structure, and nonelectronic properties of surfaces and interfaces; thin films and low-dimensional structures (restricted to new topics in section 68)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2005
• Volume: 107
• Issue: 4
• Pages: 702-711

Dates

published

2005-04

received

2004-09-20

Contributors

author

R. Brusa

• Dipartimento di Fisica, Università di Trento, 38050 Povo (Tn), Italy

author

C. Macchi

• Dipartimento di Fisica, Università di Trento, 38050 Povo (Tn), Italy

author

S. Mariazzi

• Dipartimento di Fisica, Università di Trento, 38050 Povo (Tn), Italy

author

G. Karwasz

• Dipartimento di Fisica, Università di Trento, 38050 Povo (Tn), Italy

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Identifiers

DOI

10.12693/APhysPolA.107.702