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2005 | 107 | 4 | 702-711
Article title

Porosity of Low-κ Materials Studied by Slow Positron Beam

Content
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Languages of publication
EN
Abstracts
EN
The information about porosity in low-κ materials obtainable by depth profiling with positron annihilation spectroscopy is reviewed. In particular we focus on Doppler broadening spectroscopy and 2-3γ ratio of positronium measurements on SiOCH and amorphous carbon a-C:F:H thin films produced by plasma enhanced chemical vapour deposition.
Keywords
Year
Volume
107
Issue
4
Pages
702-711
Physical description
Dates
published
2005-04
received
2004-09-20
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv107n422kz
Identifiers
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