EN
The differences in the Rutherford backscattering angular spectra measured for 100 keV hydrogen atoms H^0 and protons H^+ backscattered from Si crystal are reported and analysed. It was shown that the H^0 atom beam is better channelled in the pure crystal and is much more sensitive to the crystal surface coverage, particularly Au layer than the H^+ ion beam. The deep crystal regions seem to strengthen this differences.