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2002 | 102 | 6 | 759-766
Article title

Channelling of H^0 and H^+ in Si Single Crystal

Content
Title variants
Languages of publication
EN
Abstracts
EN
The differences in the Rutherford backscattering angular spectra measured for 100 keV hydrogen atoms H^0 and protons H^+ backscattered from Si crystal are reported and analysed. It was shown that the H^0 atom beam is better channelled in the pure crystal and is much more sensitive to the crystal surface coverage, particularly Au layer than the H^+ ion beam. The deep crystal regions seem to strengthen this differences.
Keywords
EN
Year
Volume
102
Issue
6
Pages
759-766
Physical description
Dates
published
2002-12
received
2002-05-06
(unknown)
2002-07-22
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv102n601kz
Identifiers
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