PL EN


Preferences help
enabled [disable] Abstract
Number of results
2002 | 102 | 2 | 283-288
Article title

Investigation of Lattice Strains in Layered Structures Containing Porous Silicon

Content
Title variants
Languages of publication
EN
Abstracts
EN
Silicon layered structures containing porous silicon modified with various thermal treatments and epitaxial layers deposited on porous layers were studied with a number of complementary X-ray diffraction methods using synchrotron source. The methods of characterisation included recording of rocking curves for reflections with various asymmetry as well as projection, section and micro-Laue topography. It was found that oxidising and sintering of porous silicon seriously modified the strains in the porous layer and in some cases even inverting the sense of strain with respect to that in initially formed porous layer. Consequently the deposited epitaxial layer usually was not laterally coherent with the substrate. Some of the investigated layers were not stable in time and after few months period exhibited significant lost of coherence of porous skeleton.
Keywords
EN
Year
Volume
102
Issue
2
Pages
283-288
Physical description
Dates
published
2002-08
received
2001-09-23
References
  • 1. T. Yonehara, K. Sakaguchi, N. Sato, Appl. Phys. Lett., 64, 2108, 1994
  • 2. N. Sato, K. Sakagguchi, K. Yamaguta, Y. Fujiyama, T. Yonchara, in: Proc. 7th Int. Symp. on Si Mater. Science and Technology Semiconductor Si, PV94-10, 1994, p. 443
  • 3. K. Barla, G. Bomchil, R. Herino, J.C. Pfister, J. Baruchel, J. Cryst. Growth, 68, 721, 1984
  • 4. C. Faivre, D. Bellet, J. Appl. Crystallogr., 32, 1134, 1999
  • 5. J. Salonen, M. Bjorkvist, E. Laua, J. Appl. Crystallogr., 33, 505, 2000
  • 6. G. Kowalski, J. Gronkowski, M. Moore, Z. Marcic, A. Nossarzewska-Orłowska, A. Brzozowski, Il Nuovo Cimento D, 19, 561, 1997
  • 7. W.P. Maszara, B.-L. Jiang, A. Yamada, G.A. Rozgonyi, H. Baumgart, A.J.R. De Kock, J. Appl. Phys., 69, 257, 1991
  • 8. I.L. Toriani, O. Teschke, M.U. Kleinke, Acta Crystallogr. A, 49, S370, 1993
  • 9. K. Wieteska, W.K. Wierzchowski, W. Graeff, A. Nossarzewska-Orłowska, A. Brzozowski, Electron Technol., 31, 213, 1998
  • 10. K. Wieteska, W.K. Wierzchowski, W. Graeff, A. Nossarzewska-Orłowska, A. Brzozowski, Universitatis Iagiellonicae Folia Physica, Fas., XXXXIX, 91, 1997
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv102n214kz
Identifiers
JavaScript is turned off in your web browser. Turn it on to take full advantage of this site, then refresh the page.