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2001 | 100 | 6 | 859-869
Article title

Direct Ellipsometry Problem for the Substrate-Based Uniaxial Non-Homogeneous Film

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EN
Abstracts
EN
An iterative procedure of calculation of reflectivities and transmission coefficients of light rays for an uniaxial film with a lapse rate of an index of refraction on a uniaxial substrate was gained by orienting the axis of anisotropy along the normal to the boundary. With its help the dependences of ellipsometric anglesΔ andψ for a linear, quadratic, and sine-shaped profiles of refractive indices of a uniaxial immersing film with optic axis oriented along the normal to the boundary were analyzed. The dependences of anglesΔ andψ on quantity of an uptake and anisotropy of the film were also examined. The numerical modelling for ZnO films and Langmuir-Blodgett-like films on a melted quartz was carried out, and this allowed to draw conclusions of practical importance for the ellipsometric investigations of the film structures.
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Contributors
author
  • Koszalin Technical University, al. Kwiatkowskiego 6-E, 75-343 Koszalin, Poland
author
  • Department of Laser Physics and Spectroscopy, Belarussian State University, Fr. Skaryna ave. 4, 220050 Minsk, Belarus
References
  • 1. Thin Films - Interdiffusion and Reactions, Eds. J.M. Poate, K.N. Tu, J.W. Mayer, Wiley, New York 1978, p. 576
  • 2. R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam 1977, p. 583
  • 3. The Fundamentals of Ellipsometry, Ed. A.W. Rzhanov, Nauka, Novosibirsk 1979, p. 419
  • 4. A. Yariv, P. Yeh, Optical Waves in Crystals, Wiley, New York 1984, p. 616
  • 5. V.V. Filippov, A.Yu. Tronin, A.F. Konstantinova, Crystallography, 39, 360, 1994
  • 6. A.Y. Tronin, A.F. Konstantinova, V.V. Filippov, M.M. Karpuk, Proc. SPIE, 1270, 151, 1990
  • 7. L.M. Brekhovskikh, Waves in Stratified Mediums, Nauka, Moscow 1973, p. 343
  • 8. F.I. Fedorov, Optics of Anisotropic Media, Belarus Academy Sciences Publishers, Minsk 1958, p. 380
  • 9. G.K. Carniglia, J. Opt. Soc. Am. A, 7, 848, 1990
  • 10. Acoustic Crystals, Ed. M.P. Shaskolskaya, Nauka, Moscow 1982, p. 632
Document Type
Publication order reference
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bwmeta1.element.bwnjournal-article-appv100n601kz
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