Surface Modification of Solids by Extreme Ultraviolet and Plasma Treatment

• Authors: A. Bartnik , H. Fiedorowicz , W. Skrzeczanowski , J. Czwartos , P. Wachulak , R. Jarocki , J. Kostecki
• Languages of publication: EN

Abstracts

EN

In this paper, results of surface modification, using a laser-produced plasma source of extreme ultraviolet, and the extreme ultraviolet induced low temperature plasmas, are presented. It was shown that irradiation of different materials by intense extreme ultraviolet pulses results in strong changes of the surface morphology. Examples of micro- and nanostructures obtained this way are presented. It was also demonstrated that a dual action of the radiation pulses and low temperature plasmas allows to modify a molecular structure of exposed materials.

Keywords

EN

laser plasma; photoionized plasma; surface treatment; nanostructures

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2018
• Volume: 133
• Issue: 2
• Pages: 267-270

Dates

published

2018-02

Contributors

author

A. Bartnik

• Institute of Optoelectronics, Military University of Technology, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

H. Fiedorowicz

• Institute of Optoelectronics, Military University of Technology, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

W. Skrzeczanowski

• Institute of Optoelectronics, Military University of Technology, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

J. Czwartos

• Institute of Optoelectronics, Military University of Technology, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

P. Wachulak

• Institute of Optoelectronics, Military University of Technology, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

R. Jarocki

• Institute of Optoelectronics, Military University of Technology, S. Kaliskiego 2, 00-908 Warsaw, Poland

author

J. Kostecki

• Institute of Optoelectronics, Military University of Technology, S. Kaliskiego 2, 00-908 Warsaw, Poland

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Identifiers

DOI

10.12693/APhysPolA.131.267