Multiaxis interferometric displacement measurement for local probe microscopy

• Authors: Josef Lazar , Jan Hrabina , Mojmír Šerý , Petr Klapetek , Ondřej Číp
• Languages of publication: EN

Abstracts

EN

We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

Keywords

EN

interferometry; nanometrology; microscopy

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2012
• Volume: 10
• Issue: 1
• Pages: 225-231

Dates

published

1 - 2 - 2012

online

3 - 12 - 2011

Contributors

author

Josef Lazar

• Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic

author

Jan Hrabina

• Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic

author

Mojmír Šerý

• Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic

author

Petr Klapetek

• Czech Metrology Institute, Okružní 31, 638 00, Brno, Czech Republic

author

Ondřej Číp

• Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republic

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Identifiers

DOI

10.2478/s11534-011-0093-5