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2012 | 10 | 1 | 225-231
Article title

Multiaxis interferometric displacement measurement for local probe microscopy

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EN
Abstracts
EN
We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
Keywords
Publisher
Journal
Year
Volume
10
Issue
1
Pages
225-231
Physical description
Dates
published
1 - 2 - 2012
online
3 - 12 - 2011
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.-psjd-doi-10_2478_s11534-011-0093-5
Identifiers
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