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Journal
2012 | 10 | 1 | 218-224
Article title

Study of diamond film nucleation by ultrasonic seeding in different solutions

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EN
Abstracts
EN
In this study we have investigated diamond nucleation on Si substrates by ultrasonic seeding with different liquid solutions of Ultradispersed Detonation Diamond (UDD) powder in a mixture of metal nano- or microparticles (Ni, Co, Y). The influence of different solutions on nucleation efficiency was investigated. For highlighting nucleation centers and better evaluation of the nucleation process the nucleated samples were moved into a Microwave Plasma Enhanced Chemical Vapor Deposition (MW CVD) reactor and a ”short-time” (10 min), then followed by a ”long-time” (+1 hour), diamond deposition was performed. The morphology of samples was characterized by Scanning Electron Microscopy (SEM) and the chemical composition of grown diamond layer was investigated by Raman Spectroscopy. From the measurements we found out that microsized metal particles positively influenced nucleation and the uniformity of the deposited diamond thin film. The lowest surface roughness was achieved in the case of nanodiamond powder mixed with Co and Y metal powder. The influence of Ni, Co and Y to the nucleation and early growth stage are discussed.
Keywords
Publisher

Journal
Year
Volume
10
Issue
1
Pages
218-224
Physical description
Dates
published
1 - 2 - 2012
online
3 - 12 - 2011
Contributors
author
  • Faculty of Electrical Engineering and Informaton Technology, Slovak University of Technology, Ilkovičova 3, 812 19, Bratislava, Slovak Republic, marian.varga@stuba.sk
author
  • Institute of Physics AS CR, v.v.i., Cukrovarnicka 10, CZ-16253, Praha 6, Czech Republic
  • Institute of Physics AS CR, v.v.i., Cukrovarnicka 10, CZ-16253, Praha 6, Czech Republic
  • Faculty of Electrical Engineering and Informaton Technology, Slovak University of Technology, Ilkovičova 3, 812 19, Bratislava, Slovak Republic
author
  • Institute of Physics AS CR, v.v.i., Cukrovarnicka 10, CZ-16253, Praha 6, Czech Republic
  • International Laser Center, Ilkovičova 3, 812 19, Bratislava, Slovak Republic
References
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Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.-psjd-doi-10_2478_s11534-011-0078-4
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