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Journal
2011 | 9 | 2 | 300-306
Article title

Topography and nanomechanical properties of Pd-C films

Content
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Languages of publication
EN
Abstracts
EN
Atomic force microscopy (AFM) topographical studies and results of nanoindentation experiment for several palladium-carbon films (Pd-C film) deposited on various substrates and with varying palladium content are presented. Pd-C films were prepared by a physical vapor decomposition (PVD) process and next were modified by a chemical vapor decomposition (CVD) method to obtain carbonaceous porous structure with dispersed palladium nanograins and a variation in roughness.The dependence of film topography on the kind of substrate such as Al2O3, Mo polycrystalline foil and fused silica was studied by AFM. Nanomechanical properties such as hardness and the reduced indentation modulus were determined by nanoindentation. A comparison of these values for films with different Pd content deposited on various substrates is presented.
Publisher
Journal
Year
Volume
9
Issue
2
Pages
300-306
Physical description
Dates
published
1 - 4 - 2011
online
20 - 2 - 2011
References
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.-psjd-doi-10_2478_s11534-010-0134-5
Identifiers
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